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《Micronanoelectronic Technology》 2007-05
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Optical and Electrical Properties of ITO Thin Film Prepared by the Sol-Gel Process

YU Zhong-xi,GAO Shan-min,ZHANG Jiang,CHEN Jian,QU Rong-jun(School of Chemistry and Materials Science,Ludong University,Yantai 264025,China)  
Highly-conductive ITO transparent thin films were prepared on common glass substate by the sol-gel spin-coating process.The effects of heat-treatment temperature and time,Sn dopant content and thickness on the optical and electrical properties of ITO thin films were investigated by UV-Vis transmission spectra and four-probe electrical measurement.The electrical and optical measurement results indicate that the sheet resistance decreases with increasing Sn content up to 11% and then increases with further increasing Sn content,while the sheet resistance decreases with increasing heat-treatment temperature in certain temperature range and the optical transparency increases with increasing heat-treatment temperature.With increasing heat-treatment time,the transmittance of ITO films decreases almost linearly and the sheet resistance first decreases and then increases with extending heat treatment time.Under the best processing conditions,the ave-rage visible transmittance is about 86% and the sheet resistance is about 322 Ω/□.
【Fund】: 山东省自然科学基金资助项目(Y2005f11);; 鲁东大学中青年自然科学基金资助项目(21000301)
【CateGory Index】: O484.4
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