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《Micronanoelectronic Technology》 2007-Z1
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Novel Electrostatic Microrelay with Parallel-Comb Drive

LI Yang,XU Gao-bin (School of Science,Hefei University of Technology,Hefei 230009,China)  
A novel electrostatic microrelay with parallel-comb drive structure and its fabrication process were presented.By optimizing the structure of the design,5V threshold voltage of the microrelay depending upon geometrical parameter choices was achieved.The main body of the microrelay was fabricated with a set of surface sacrificial standard process.Using sputtered Au as contact material,the contact resistance was reduced to 100 mΩ with the life time of the microrelay increased.Thus,the microrelay can be integrated with ICs on the same chip easily in industrial manufacture,since both the threshold voltage and the fabrication process of the microrelay are compatible with normal integrated circuits'.
【Fund】: 安徽省教育厅自然科学研究重点项目(2006KJ026A)
【CateGory Index】: TM581.1
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