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《Micronanoelectronic Technology》 2007-Z1
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Miniature Co-Plane Differential-Pressure Sensor

JIN Qi,LI Chang-chun,YANG Yong,LIU Hong-wei,SUN Ke (Shenyang Academy of Instrumentation Science,Shenyang 110043,China)  
The miniature co-plane differential-pressure sensor is a kind of pressure sensor,the sensor is mainly used for surveying and controlling pressure differences of the two oil ducts.SOI Si crystal material was used for manufacturing Si piezoresistive pressure sensitive chip in this pro-duct,the sensitive unit operating temperatures rang was-55 ~ 300 ℃, and it transformed the oil duct pressure difference signal into electrical signal through the twin core body structure,and it used the precise signal processing electric circuit to amplify and deal with the weak electrical signal for the realization of standard simulated signal output.
【CateGory Index】: TP212.12
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Chinese Journal Full-text Database 10 Hits
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5 CHEN Li-hu, YE Xiang-bing, HU Gang (Inst of Electromechanical Engin and Automation,National University of Defence Technology,Changsha 410073,China);Application of Hall sensor in recognition of centrifuge's rotors[J];Journal of Transducer Technology;2004-03
6 YANG Chao-ying~1, XU Long-xiang~2(1.Coll of Automation Engin,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China;2.Coll of Mech & Elct Engin,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China);Study on differential transformer displacement sensors for active magnetic bearings[J];Journal of Transducer Technology;2005-09
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8 YU Zhen,ZENG Xiao-yan(Huazhong University of Science and Technology,The State Key Laboratory of Laser Technology,Wuhan430074,China);Study on CCD testing and measurement system for laser welded sheet metals,gap[J];Electric Welding Machine;2003-04
9 WANG Zhi-bo,BI Yan-ru (Computer Science and Engineering Department,Huaian College of Information Technology,Huaian 223003,China);Monitoring by Multistation and Grafting Datum about Ice Temperature in Ice Plant[J];Computer Knowledge and Technology;2008-28
10 LIU Zu-gang(Faculty of Physics and Electronic Technology,Hubei University,Wuhan 430062,China);The Thinks about the New Theory System of the Analog Circuits Textbook[J];Journal of Electrical & Electronic Engineering Education;2005-06
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