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《Micronanoelectronic Technology》 2007-Z1
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Design of the Interface Circuit for Monolithic MEMS Capacitive Pressure Sensor

HUANG Xiao-dong,ZHANG Xiao-duo,WANG Bin,QIN Ming,HUANG Qing-an (Key Laboratory of MEMS of Ministry of Education,Northeast University, Nanjing 210096,China)  
An interface circuit based on the principle of capacitance-frequency conversion of the capacitive pressure sensor was introduced.The influences of the fluctuation of temperature and process were eliminated in virtue of differential-frequency circuit.The error characteristic of the interface circuit was analyzed by Pspice,in terms of which the parameters of the circuit are confirmed.The measure of the circuit was presented.The measure results accord with Pspice simulation,the revolution of the circuit is about 3.77 Hz/hPa in 80~110 kPa.
【Fund】: 国家自然科学基金重点课题资助项目(90607002)
【CateGory Index】: TP212.12
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