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Research on Damping Characteristics of MEMS Piezoresistive Accelerometer

Bian Yumin,Zheng Feng,He Hongtao(The 13th Research Institute,CETC,Shijiazhuang 050051,China)  
The effect of the gas damp on the microelectromechanical system (MEMS) piezoresistive accelerometer was studied.The dynamic model and air damp model for the accelerometer were established.The relationship between the gas gap and the damping coefficient was analyzed.A sandwich structure for the accelerometer was designed based on the analysis result.The accelerometer stress and stain was simulated and analyzed using the finite element method,and the structure parameters of the piezoresistive accelerometer were designed.The MEMS piezoresistive accelerometer was fabricated with micromachining process and wafer level packaging(WLP).The test results prove that the sandwich structure can control the accelerometer dam-ping characteristics and provide approaches for improving the performance.
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