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《Micronanoelectronic Technology》 2009-08
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Stress Distribution of Thin Circular Quartz Crystals and Force Frequency Sensitive Experiments

Luo Bing1,Tian Wenjie1,Zou Shufang2(1.The Key Laboratory for Sensor,Beijing Information Science & Technology University,Beijing 100101,China;2.Yunnan Radio & TV University,Kunming 650223,China)  
The stress distribution of a circular quartz crystal was analized by using ANSYS finite element method when quartz crystal was subjected to a force F along x axis.The ratios of the stresses changing in the three electrode points were calculated.The base-frequency of three-electrode resonators was tested,and the corresponding force frequency coefficients were calculated.By comparing the results of ANSYS simulation analysis with the experiment results,it shows that they are basically identical,and proves that ANSYS simulation analysis is feasible.Therefore,according to the stress distribution in the chip,the electrode is set on the point with large stress changing in a finite space by the finite element method to obtain a integrated quartz resonator with the prominent force frequency sensitivity characteristic when a resonator is designed on the same circular quartz crystal.
【Fund】: 北京市自然科学基金(4082011);; 北京(传感器)重点实验室开放课题基金(KM200810772008);; 北京市教委科技创新平台基金资助项目(PXM2008_014224_067420)
【CateGory Index】: TN752.2
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