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《Micronanoelectronic Technology》 2010-08
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System-Level Modeling Method of Variable Cross-Section Beams

Hao Xing,Yuan Weizheng,Chang Honglong,Niu Haobin,Jiao Wenlong(Micro and Nano Electromechanical Systems Laboratory,Northwestern Polytechnical University,Xi′an 710072,China)  
Based on the theory of matrix structural analysis and theory of elasticity,a mechanical model of a variable cross-section linear beam was built,the beam width changed linearly along with the length,and its parameterized system-level component was established by hardware description language.The system-level simulation results of the cantilever beam based on the component were compared with the finite element simulation results,the maximum errors of the static analysis and frequency domain analysis were within 0.75% and 0.84%,respectively.Using the system-level components of the anchor,force,mass,straight comb,variable cross-section beam and so on,a system-level model of the planar crab-leg micro accelerometer was established and simulated in Zeni-VLG.The simulation results of the accelerometer were compared with the finite element simulation results,the maximum errors of the frequency domain analysis and time domain analysis were within 3.60% and 3.65%,respectively.The consumed time of the time domain analysis for the system-level simulation was only 4 min,while that for the finite element simulation was 56 min.The result indicates that the speed of the system-level simulation is increased nearly 10 times compared to that of the finite element under the condition of high simulation accuracy.
【Fund】: 国家高技术研究发展计划(863计划)资助项目(2007AA04Z347 2009AA04Z320)
【CateGory Index】: TP211.4
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