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《Chinese Journal of Semiconductors》 2001-12
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Fabrication of MEMS Optical Switches

LIANG Chun guang,XU Yong qing and YANG Yong jun(The Electronic 13th Institute of Information Industry Ministry,Shijiazhuang 050051,China)  
Three kinds of MEMS optical switches with different mechanical structures are produced by the bulk micromachining processes.The first is 2D optical switch with horizontal actuator,the second is 2D optical switch with vertical actuator,and the third is 2D?3D optical switch with wiggly actuator.The first is formed with monolayer bulk silicon structure,the others use the silicon on glass bonding structures.Their principles of operation are all based on silicon digital micromirrors technology.The electrostatic actuators with low driving voltage are used in the three kinds of optical switch.The actuation voltages for the third kinds of optical switch are less than 15V.The grooves used for optical fibers being self aligned coupling are made on silicon substrate for the 2D switch arrays device.Computer simulation and analysis of on off characteristic show that the second and the third optical switches have switching time less than 1ms.
【Fund】: 国家八六三光电子主题、国家集成光电子联合重点实验室资助项目~~
【CateGory Index】: TN253
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