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《Chinese Journal of Semiconductors》 2002-09
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Computer-Aided Design of RF-MEMS Switch

Wei Huazheng 1,Guo Fangmin 1,Lai Zhongsheng 1,Zhu Shouzheng 1,Zhu Ziqiang 1, Li Xiaowei 2,Cheng Zhiqun 2 and Sun Xiaowei 2(1 College of Information Science & Technology,East China Normal University,Shanghai 200062,China) (2 Shanghai Institute o  
A RF MEMS switch is designed by computer aided design (CAD) method.The transmission line loss of the coplanar waveguide (CPW) and the equivalent circuit model of the microelectromechanical systems (MEMS) switch are simulated using Agilent ADS software.The actuation voltage of the switch is also analysed by ANSYS software.Significant simulation results of the shunt capacitive switch,operating at 35GHz,are obtained.
【Fund】: 国家基础研究发展基金 (973 ) (No.G19990 3 3 10 -5 );; 国家杰出青年基金 (批准号 :6992 5 40 9);; 上海市 AM基金 (No.0 0 0 4)资助项目~~
【CateGory Index】: TP391.72
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Chinese Journal Full-text Database 2 Hits
1 Sun Jianhai and Cui Dafu(State Key Laboratory of Transducer Technology,Institute of Electronics,Chinese Academy of Sciences,Beijing 100080,China);Designs and Analysis of Series Capacitive RF-MEMS Switches[J];Chinese Journal of Semiconductors;2005-12
2 WU Qing-xin1,CHEN Guang-hong1,YU Ying2,LUO Zhong-zi3(1.Department of Electronic Information Engineering,Suzhou Vocational University,Suzhou 215104,China;2.College of Telecommunications & Information Engineering,Nanjing University of Posts and Telecommunications,Nanjing 210003,China;3.Sah Pendung MEMS Research Center,Xiamen University,Xiamen 361005,China);Study on key fabrication process of RF MEMS switch with cantilever structure[J];Transducer and Microsystem Technologies;2009-09
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1 XIN Pei-sheng DING Ling SHI Yan-ling ZHU Zi-qiang LAI Zong-sheng (Institute of Infor. Scien. & Technology East China Normal University, Shanghai 200062, China);Application of AlSi alloy membrane in MEMS capacity switch[J];Semiconductor Technology;2001-12
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Chinese Journal Full-text Database 5 Hits
1 Sun Jianhai1,Cui Dafu 1, ,and Xiao Jiang2 (1 State Key Laboratory of Transducer Technology,Institute of Electronics,Chinese Academy of Sciences,Beijing 100080,China)(2 State Key Laboratory of Microwave Image Technology,Institute of Electronics,Chinese Academy of Sciences,Beijing 100080,China);Fabrication and Numerical Simulation of a MicromachinedContact Cantilever RF-MEMS Switch[J];Chinese Journal of Semiconductors;2006-02
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