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《Chinese Journal of Semiconductors》 2002-10
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Electrical and Optical Properties of Zinc Oxide Films Prepared by Pyrolysis of Zinc Acetate

Yang Chengxing,Ji Zhenguo,Liu Kun,Fan Ruixin and Ye Zhizhen(State Key Laboratory of Silicon Material,Zhejiang University,Hangzhou 310027,China)  
Zinc oxide thin films are prepared by pyrolysis of the nebulized solution of zinc acetate onto the heated glass substrates.The properties of the films are studied by XRD,UV-VIS absorption and Hall effect measurement.The results show that the films exhibit hexagonal wurtzite structure with c -axis perpendicular to the substrate surface.The effects of the substrate temperature on the electrical and optical properties of ZnO thin films are also studied.As-grown ZnO thin film with carrier concentration as low as 7.68×10 10 cm -3 is obtained,which is important to fabricate p-type ZnO films.
【Fund】: 国家重点基础研究专项基金资助项目 (No .G2 0 0 0 0 6 83 0 6 )~~
【CateGory Index】: TN304.055
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