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《Chinese Journal of Semiconductors》 2003-12
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An Example on IC Process Diagnosing

Yan Liren,Li Ruiwei and Xu Chunlin(Institute of Microelectronics,Tsinghua University,Beijing 100084,China)  
A computer analysis that deals with the PCM (process control module) parameters is introduced.Since the principal component analysis (PCA) is preferable for extracting information in the IC design field,this multivariate statistic tool is adopted in a similar way to get answers in IC process failure.After the characteristic of the tested PCM data is described by PCA,diagnostic conclusions for a process failure can be easily obtained.This method is illustrated by an example,which is proved successful.The PCA method thus is useful for further IC process diagnosing.
【CateGory Index】: TN407
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Chinese Journal Full-text Database 1 Hits
1 JU Li-jie,YAN Li-ren(Institute of Microelectronics,Tsinghua University,Beijing 100084,P.R.China);A Method for Describing and Monitoring Process States in IC Fabrication[J];Microelectronics;2006-04
Chinese Journal Full-text Database 1 Hits
1 YAN Liren, GUO Jin, CAO Bingjun (Institute of Microelectronics, Tsinghua University, Beijing 100084, P R China);Principal Component Analysis of PCM Parameters[J];Microelectronics;2003-03
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