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《Chinese Journal of Semiconductors》 2004-01
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Characterization of ZnO Thin Film Preparation by Sol-Gel Spinning-Coating

Ji Zhenguo,Song Yongliang,Yang Chengxing,Liu Kun,Wang Chao and Ye Zhizhen(State Key Laboratory for Silicon Materials,Zhenjiang University,Hangzhou 310027,China)  
Zinc oxide films are prepared on quartz substrates by the sol-gel process using a spinning-coating technique.The ZnO films show a hexagonal wurtzite structure and c-axis orientation as observed by XRD.Optical transmittance spectra of the ZnO films indicates that the bandgap of the thin films is 3.28eV,nearly the same as that of ZnO bulk crystal.PL spectra of the ZnO thin films obtained at different processing temperatures are investigated.The results show that all ZnO thin films emit strong UV photoluminescence at room temperature,but a visible emission band appears as the processing temperature exceeding 700℃.
【Fund】: 国家重点基础研究发展规划 ( No.G2 0 0 0 0 683 )资助项目~~
【CateGory Index】: O484.1
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【References】
Chinese Journal Full-text Database 10 Hits
1 Shen Weidong,Liu Xu,Zhu Yong,Zou Tong,Ye Hui,and Gu Peifu(State Key Laboratory of Modern Optical Instrumentation,Zhejiang University,Hangzhou 310027,China);Determination of Optical Constants and Thickness of Semiconductor Thin Films by Transmission Measurement[J];Chinese Journal of Semiconductors;2005-02
2 Wang Li,Fang Wenqing,Pu Yong,Zheng Changda,Dai Jiangnan,Mo Chunlan,and Jiang Fengyi(Education ministry Engineering Research Center for Luminescence Materials and Devices, Nanchang University,Nanchang 330047,China);Influence of Dispersion on ZnO and GaN XRD Rocking Curves[J];Chinese Journal of Semiconductors;2005-05
3 CHEN Han1,NI Yong2,PENG Jun3(1.Sichuan Electromechanical Institute of Vocation and Technology,Panzhihua 617000,China;2.Sichuan Petroleum Engineering Construction Co Ltd,Chengdu 610215,China;3.Sichuan Jiacheng Oil and Gas PipeLine Quality Inspecting and Testing Co Ltd,Chengdu 610213,China);Investigation of Optical Performance about Cd-doped ZnO Thin Films[J];Development and Application of Materials;2011-03
4 FAN Yan-jie,HUANG Ying,HUANG Fei,DU ZHAO-feng School of Science,Northwestern Polytechnical University,Xi’an 710072,China;Research and Application of Barium Ferrite Thin Films[J];Journal of Magnetic Materials and Devices;2006-06
5 ZHOU Ying,DENG Hong,LI Yan,CHENG Zhen-juan (School of Microelectronics and Solid State Electronics, Univ. of Electron. Sci. & Tech. of China Chengdu 610054);Preparation of the ZnO Thin Films by Sol-Gel Method[J];Journal of University of Electronic Science and Technology of China;2006-05
6 CHEN Zhu1, ZHANG Shu-ren2, YANG Cheng-tao2, CHEN Fu-gui2, DONG Jia-he2, WANG Sheng2 (1. Department of Telecommun Eng, Chengdu University of Information Technology, Chengdu 610225, China; 2. School of Microelectronics and Solid State Electronics, University of Electronic Science and Technology of China, Chengdu 610054, China);Research of Deposition Condition and Structural Properties of ZnO Films Grown by RF Magnetron Sputtering[J];Electronic Components and Materials;2006-07
7 JIN Lan,ZHOU Hui,ZHANG Qi,XU Wei (Department of Materials Science,Fudan University,Shanghai 200433,China);The Preparation and Characterization of ZnO Films by in situ Oxidation of Zn Films[J];Journal of Fudan University(Natural Science);2006-03
8 ZHANG Hong,LIU Yin-chun,RUAN Kai-bin,WU Yi-bing(College of Electrical and Mechanical Engineering,Fujian Agriculture and Forestry University,Fuzhou,Fujian 350002,China);Crystal structures and optical properties of Zn_(1-x)Mg_xO film prepared by sol-gel method[J];Journal of Fujian Agriculture and Forestry University(Natural Science Edition);2012-03
9 HE Lin;LIU Minxia;ZHANG Geng;WU Muying;LUO Shiyu;School of Electronic Engineering,Dongguan University of Technology;;Effects of Annealing Temperature of Seed Layer on Properties of Zno Nanorod Arrays[J];Semiconductor Optoelectronics;2013-06
10 LI Xiao-peng;HUANG Ying;WEI Xiao-feng;HE Huan;FU Yue-chun;ZHAN Feng;SHEN Xiao-ming;Key Laboratory of New Processing Technology for Materials and Nonferrous Metal,Ministry of Education,College of Material Science and Engineering,Guangxi University;;The influence of oxygen partial pressure on the structural and optical properties of AZO thin films[J];Journal of Guangxi University(Natural Science Edition);2014-03
【Citations】
Chinese Journal Full-text Database 3 Hits
1 YE Zhi-zhen,CHEN Han-hong,LIU Rong,ZHANG Hao-xiang and ZHAO Bin-hui(National Key Laboratory of Silicon Materials,Zhejiang University,Hangzhou 3100 27,China);Structure and PL Spectrum of ZnO Films Prepared by DC Reactive Magnetron Sputtering[J];Chinese Journal of Semiconductors;2001-08
2 Song Dengyuan,Wang Yongqing,Sun Rongxia,Zong Xiaoping and Guo Baozeng(College of Electronic and Informational Engineering,Hebei University,Baoding 071002,China);Effect of Ar Pressure on Properties of ZnO∶Al Films Prepared by RF Magnetron Sputtering[J];Chinese Journal of Semiconductors;2002-10
3 Yang Chengxing,Ji Zhenguo,Liu Kun,Fan Ruixin and Ye Zhizhen(State Key Laboratory of Silicon Material,Zhejiang University,Hangzhou 310027,China);Electrical and Optical Properties of Zinc Oxide Films Prepared by Pyrolysis of Zinc Acetate[J];Chinese Journal of Semiconductors;2002-10
【Co-citations】
Chinese Journal Full-text Database 10 Hits
1 QIN Xiu-juan1,2,WANG Jia-ning2,BU Li-min2,SUN Li2,MENG Hui-min1,LIU Ri-ping3 (1.College of Materials Science and Engineering,University of Science and Technology Beijing,Beijing 100083,China;2.College of Environmental and Chemical Engineering,Yanshan University,Qinhuangdao 066004,China;3.State Key Laboratory of Metastable Materials Science and Technology,Yanshan University,Qinhuangdao 066004,China);Effect of Ag and Al doping on structure and optical properties of ZnO thin films[J];Ordnance Material Science and Engineering;2008-05
2 LU Jian guo, YE Zhi zhen, WANG Lei (State Key Laboratory of Silicon Materials, Zhejiang University, Hangzhou 310027, CHN);Recent Advance in Research on Ultraviolet Stimulated Emission for ZnO Films[J];Semiconductor Optoelectronics;2002-03
3 LV Jian-guo1,2,SONG Xue-ping1,SUN Zhao-qi1(1.School of Physics and Material Science,Anhui University,Hefei 230039,CHN;2.Department of Physics and Electronic Engineering,Hefei Teachers College,Hefei 230061,CHN);Surface Topography and Optical Properties of Al-doped ZnO Thin Films by Sol-gel Process[J];Semiconductor Optoelectronics;2009-01
4 WANG Rui-hua,LI Huai-xiang,ZHANG Hua,ZHAO Jing(Chemical Functional Materials Laboratory,Institute of Semiconductors,Shandong Normal University,Jinan 250014,China);A novel method for preparing zinc oxide nanoparticals with photoluminescence at room temperature[J];Micronanoelectronic Technology;2004-02
5 YANG Li-ping,LIU Feng,HAN Huan-peng (Department of Semiconductor Material,The 46th Research Instituted of CETC,Tianjin 300220,China);Research and Development of ZnO[J];Micronanoelectronic Technology;2007-02
6 Yang Chengxing,Ji Zhenguo,Liu Kun,Fan Ruixin and Ye Zhizhen(State Key Laboratory of Silicon Material,Zhejiang University,Hangzhou 310027,China);Electrical and Optical Properties of Zinc Oxide Films Prepared by Pyrolysis of Zinc Acetate[J];Chinese Journal of Semiconductors;2002-10
7 Zou Lu,Ye Zhizhen,Huang Jingyun and Zhao Binghui(State Key Laboratory of Silicon Materials,Zhejiang University,Hangzhou 310027,China);Growth of Zn_(1-x)Mg_xO Films by Pulsed Laser Deposition[J];Chinese Journal of Semiconductors;2002-12
8 Lü Jianguo,Ye Zhizhen,Zhang Yinzhu,Huang Jingyun and Zhao Binghui(State Key Laboratory of Silicon Materials,Zhejiang University,Hangzhou 310027,China);ZnO Films Synthesized by Solid-Source Chemical Vapor Deposition with c-Axis Parallel to Substrate[J];Chinese Journal of Semiconductors;2003-01
9 Zhang Xitian 1,2 ,Liu Yichun 2,Zhi Zhuangzhi 2,Zhang Jiying 2,Shen Dezhen 2, Xu Wu 2,Zhong Gouzhu 2 and Fan Xiwu 2(1 Department of Physics,Harbin Normal University,Harbin 150080,China) (2 Open Laboratory of Excited State Processes,Changchun Institute of Optics,Fine Mechanics and Physics, The Chinese Academy of Sciences,Changchun 130021,China);Investigation on Nanocrystalline ZnO Thin Films Prepared by Thermal Oxidation of ZnS Thin Films[J];Chinese Journal of Semiconductors;2003-01
10 Wang Qingpu,Zhang Deheng and Xue Zhongying(School of Physics and Microelectronics,Shandong University,Jinan 250100,China );Photoluminescence of ZnO Films Deposited on Si Substrate by RF Magnetron Sputtering[J];Chinese Journal of Semiconductors;2003-02
【Co-references】
Chinese Journal Full-text Database 10 Hits
1 SUN Ji-feng et al(Jiangsu Industry College,Changzhou,Jiangsu 213164);Preparation of Bar-like Nano ZnO and Analysis on Its Photocatalytic Property[J];Journal of Anhui Agricultural Sciences;2009-27
2 WANG Jin-zhong1, YAN Wei1, WANG Xin-qiang1, YIN Jing-zhi1, JIANG Xiu-ying1, YANG Shu-ren1, DU Guo-tong1, GAO Ding-shan1, Xiang Liu2, Hui Cao2, Junying Xu2, R.P.H.Chang2 (1. National Integrated Optoelectronics Lab., Dept. of Electron;Optimization of Growing and Annealing Parameters by XRD[J];Semiconductor Optoelectronics;2001-03
3 LU Jian guo, YE Zhi zhen, WANG Lei (State Key Laboratory of Silicon Materials, Zhejiang University, Hangzhou 310027, CHN);Recent Advance in Research on Ultraviolet Stimulated Emission for ZnO Films[J];Semiconductor Optoelectronics;2002-03
4 WU Dingcai 1,HU Zhigang1,DUAN Manyi 1,XU Luxiang1,LIU Fangshu2,DONG Chengjun1,WU Yannan,JI Hongxian1,XU Min1(1.Institute of Solid State Phys.,School of Phys.and Electronic Eng.,Sichuan Normal University,Chengdu 610068,CHN;2.Department of Material Engineering,Panzhihua Univesity,Panzhihua 617000,CHN);Synthesis and Properties of(Co,Cu)-doped ZnO Thin Films by Sol-Gel Method[J];Semiconductor Optoelectronics;2010-04
5 WU Muying,LUO Shiyu,SHAO Mingzhu(College of Electronic Engineering,Dongguan University of Technology,Dongguan 523808,CHN);Dynamical Stability of the Second-order Nonlinear System for Superlattice Quantum Well[J];Semiconductor Optoelectronics;2012-03
6 Sun Yicai; Fan Zhaoshu; Sun Xinyu; Ning Qiufeng(Department of Electronics Engineering, Hebei University of Technology, Tianjin 300130);Relationship Between Geometric Effect Correction on Resistivity Measurement Methods[J];SEMICONDUCTOR TECHNOLOGY;2000-05
7 Deng Zhijie (General Research Institute for Non Ferrous Metals,Beijing 100088);Growth and Applications of SiC Crystal[J];SEMICONDUCTOR TECHNOLOGY;1998-05
8 CHEN Han hong,YE Zhi zhen (State Key Laboratory of Silicon Material,Zhejiang University,Hangzhou 310027,China);Development of ZnO thin film doping and transition[J];Semiconductor Information;2001-02
9 WANG Qing-pu,ZHANG De-heng (Faculty of Physics and Microelectronics,Shandong University,Jinan 250100,China) YU Yong-qin,HUANG Bo-biao (Institute of Crystallite Materials,Shandong University,Jinan 250100,China);Light emitting characteristic of ZnO thin films[J];Semiconductor Information;2001-04
10 HUA Zhong-yi (Nanotechnology Development Center,Fudan University,Shanghai200433,China);Molecular-scale electronics and unimolecular electronics[J];Semiconductor Information;2002-07
【Secondary References】
Chinese Journal Full-text Database 10 Hits
1 Chen Hong and Shen Wenzhong(Department of Physics,Shanghai Jiao Tong University,Shanghai 200030,China);The Usage of Two Dielectric Function Models[J];Chinese Journal of Semiconductors;2006-04
2 LIU Chaoying,ZUO Yan,XU Jie(Research Institute of Glass Science,China Building Materials Academy,Beijing 100024);Research Progress of Transparent Conductive Aluminum-doped Zinc Oxide Films[J];Materials Review;2010-19
3 LI Dawei,JIANG Xiangdong,XIE Kang,CAO Dong(School of Optoelectronic Information,University of Electronic Science and Technology of China,Chengdu 610054);The Heteroepitaxy of Ag-doped ZnO Film and Study on UV Characteristics of Heterojunction[J];Materials Review;2011-02
4 WAN Bu-yong,CUI Yu-ting,FENG Qing(Chongqing Normal University,Chongqing 400047);Optical Constants of Transparent Films Measurement by Spectrophotometer[J];Physical Experiment of College;2011-06
5 ZENG Fan-qiang,ZHAN Ke-tao (School of Science,Beijing University of Chemical Tecnology,Beijing 100029,China);Photoelectric properties of ZnO:(Al,La)transparant conductive thin film prepared by sol-gel method[J];Electronic Components and Materials;2008-07
6 ZENG Linghong1,WEI Shiliang1,ZHONG Zhiyou2,GU Jinhua2(1.Department of Physics and Information Science,Liuzhou Teachers College,Liuzhou 545004,Guangxi Zhuangzu Zizhiqu,China;2.College of Electronic Information Engineering,South-Central University for Nationalities,Wuhan 430074,China);Preparation and photoelectric properties of transparent conducting AZO thin films[J];Electronic Components and Materials;2010-08
7 LIN Jiahui,PENG Qicai(School of Materials Science and Engineering,Xihua University,Chengdu 610039,China);Simulation of n-ZnO/i-ZnO/p-nc-Si thin film solar cell[J];Electronic Components and Materials;2012-05
8 RAO Jun,ZHUANG Binping,LIN Limei,QU Yan,LAI Fachun (School of Physics and Opto-Electronics Technology,Fujian Normal University,Fujian Fuzhou,350007);Zinc Oxide Thin Films Prepared by Sol-Gel Method on Quartz Substrates[J];Journal of Fuqing Branch of Fujian Normal University;2009-S1
9 Su Yijing,Hu Liqin,Zheng Xudan,Xu Yahong,Guo Tailiang(College of Physics and Information Engineering,Fuzhou University,Fuzhou 350002,CHN);The Fabrication and Field Emission Properties of ZnO-Ni Lemalle-nucleus Linear Cathodes[J];Optoelectronic Technology;2010-02
10 ZHU Hui-qun1,2,DING Rui-qin1,PANG Rui3,MAI Kai-qiang3,WU Jing-hui3(1.Institute of Thin Films and Nona-materials,Wuyi University,Jiangmen,Guangdong,529020 China;2.College of Physics Science & Engineering Technology,Sun Yat-sen University,Guangzhou,Guangdong 510275 China;3.College of Communication,Wuyi University,Jiangmen,Guangdong,529020 China);Preparation of Ultraviolet-visible-enhanced Photodetector Employing n-ZnO/p-Si Structure[J];Journal of Optoelectronics.Laser;2007-10
【Secondary Citations】
Chinese Journal Full-text Database 3 Hits
1 Li Jianguang, Ye Zhizhen, Wang Lei, Zhao Binghui, Yuan Jun, Que Duanlin(State Key Laboratory of Silicon Materials, Zhejiang University, Hangzhou\ 310027)Received 3 May 1998, revised manuscript received 12 June 1998;Characterization of ZnO Thin Film Treated With High Temperature for Buffer Layer of GaN on Silicon Substrate[J];CHINESE JOURNAL OF SEMICONDUCTORS;1999-10
2 YE Zhi-zhen,CHEN Han-hong,LIU Rong,ZHANG Hao-xiang and ZHAO Bin-hui(National Key Laboratory of Silicon Materials,Zhejiang University,Hangzhou 3100 27,China);Structure and PL Spectrum of ZnO Films Prepared by DC Reactive Magnetron Sputtering[J];Chinese Journal of Semiconductors;2001-08
3 Li Jianguang;Ye Zhizhen; Zhao Binghui and Yuan Jun (State Key Asb.of Silicon Materials,Zhejiang University, Hangzhou 310027)Received 10 March 1996, revised manuscript received 4 May 1996;Preparation and Characterization of High-Quality ZnO Film on Silicon Substrate by DC Reactive Magnetron Sputtering[J];CHINESE JOURNAL OF SEMICONDUCTORS;1996-11
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