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《Chinese Journal of Semiconductors》 2004-04
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Design and Simulation of On-Line Test Structure for Thermal Conductivity of Polysilicon Thin Films

Xu Gaobin and Huang Qing'an.(Key Laboratory of MEMS of Education Ministry,Southeast University,Nanjing 210096,China)  
An on-line test structure for measuring the thermal conductivity of polysilicon thin films is proposed.The measurement method and thermal modeling are given.The relults are confirmed by ANSYS TM .The method would find applications in the processing line because the vacuum testing circumstances are not required...
【CateGory Index】: TN304.05
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【References】
Chinese Journal Full-text Database 2 Hits
1 Zhang Yuxing,Huang Qing’an,and Li Weihua(Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China);A Novel Surface-Micromachined Structure For On-Line Measuring Thermal Expansion Coefficient of Polysilicon Thin Films[J];Chinese Journal of Semiconductors;2005-04
2 Huang Qing’an,Liu Zutao,Li Weihua,and Li Qiaoping(Key Laboratory of MEMS of the Ministry of Education,Southeast University,Nanjing 210096,China);A Test System for the in situ Extraction of the Material Parameters of MEMS Thin Films[J];Chinese Journal of Semiconductors;2006-09
【Co-references】
Chinese Journal Full-text Database 10 Hits
1 MEI Nian song,HUANG Qing an (Key Laboratory of MEMS of Education Ministry,Southeast University,Nanjing210096,China);A new structure for measuring MEMS films fracture strength——thermal actuator[J];Micronanoelectronic Technology;2003-Z1
2 XU Gao bin,HUANG Qing an (Key Lab of MEMS of Education Ministry,Southeast University,Nanjing210096,China);Test structure for determination of thermal conductivity of surface micromachined polysilicon thin films[J];Micronanoelectronic Technology;2003-Z1
3 Rong Hua 1,Huang Qing'an 1,Nie Meng 2 and Li Weihua 1(1 Key Laboratory of MEMS of Education Ministry,Southeast University,Nanjing 210096,China) (2 School of Science,Hefei University of Technology,Hefei 230009,China);An Analytical Model for Pull-in Voltage of Doubly-Clamped Multi-Layer Beams[J];Chinese Journal of Semiconductors;2003-11
4 Mei Niansong and Huang Qing'an(Key Laboratory of MEMS of Education Ministry,Southeast University,Nanjing 210096,China);Modeling and Simulation of a Test Structure for Measuring Vertical Fracture Strength of MEMS Film[J];Chinese Journal of Semiconductors;2004-01
5 Rong Hua 1,Huang Qing'an 1,Nie Meng 2 and Li Weihua 1(1 Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China) (2 School of Science,Hefei University of Technology,Hefei 230009,China);A Novel Anchor for Microbeam with Perfect Fixed-End Boundary Conditions[J];Chinese Journal of Semiconductors;2004-06
6 Nie Meng 1,2,Huang Qing'an 1,Wang Jianhua 2,Rong Hua 1 and Li Weihua 1(1 Key Laboratory of MEMS of Education Ministry,Southeast University,Nanjing 210096,China) (2 School of Science,Hefei University of Technology,Hefei 230009,China);An Electrostatic Actuated Microelectromechanical In-Situ Extracting Method for Material Property of Multi-Layer Film[J];Chinese Journal of Semiconductors;2004-11
7 Zhang Yuxing,Huang Qing’an,and Li Weihua(Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China);A Novel Surface-Micromachined Structure For On-Line Measuring Thermal Expansion Coefficient of Polysilicon Thin Films[J];Chinese Journal of Semiconductors;2005-04
8 Nie Meng,Huang Qing’an,and Li Weihua(Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China);An In-Situ Extracting Method for Residual Stresses of a Multilayer Film by Full-Field Optical Measurement[J];Chinese Journal of Semiconductors;2005-05
9 Liu Zutao,Huang Qing’an,and Li Weihua(Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China);An Optimized Micro-Rotating Structure for Measuring Residual Strain of Thin Films[J];Chinese Journal of Semiconductors;2005-05
10 ;In-Situ Test Structures of Micromachined Thin Films[J];Measurement & Control Technology;2002-07
【Secondary References】
Chinese Journal Full-text Database 3 Hits
1 Huang Qing’an,Liu Zutao,Li Weihua,and Li Qiaoping(Key Laboratory of MEMS of the Ministry of Education,Southeast University,Nanjing 210096,China);A Test System for the in situ Extraction of the Material Parameters of MEMS Thin Films[J];Chinese Journal of Semiconductors;2006-09
2 Hu Dongmei,Huang Qing'an,and Li Weihua(Key Laboratory of MEMS of the Ministry of Education,Southeast University,Nanjing 210096,China);Structure for Electrical Measurement of the Thermal Expansion Coefficient of Polysilicon Thin Films[J];Journal of Semiconductors;2008-10
3 LIU Xudong1,2,ZHU Rong2 ,XU Lijun2,ZHANG Fuxing2,LIU Peng2,ZHOU Zhaoying2 1.Key Laboratory of the Electronic Measurement Technology of the National Defense,North University of China,Taiyuan 030051,China; 2.State Key Laboratory of Precision Measurement Technology and Instruments,Tsinghua University,Beijing 100084,China;Research on Flow Sensor System Integrated with Wing of Micro Air Vehicle[J];Chinese Journal of Sensors and Actuators;2009-07
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