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《Chinese Journal of Semiconductors》 2004-06
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A Novel Anchor for Microbeam with Perfect Fixed-End Boundary Conditions

Rong Hua 1,Huang Qing'an 1,Nie Meng 2 and Li Weihua 1(1 Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China) (2 School of Science,Hefei University of Technology,Hefei 230009,China)  
In MEMS community,micro-beams are often used to extract material properties or build various devices,but the typical step-up anchors obtained from surface-micromachined process are not often well-defined fixed-ends.In order to get perfect fixed-ends,a novel anchor is presented which can be manufactured only by modifying layout,and no modification in the fabrication process is necessary.
【CateGory Index】: TH703
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【References】
Chinese Journal Full-text Database 1 Hits
1 Huang Qing’an,Liu Zutao,Li Weihua,and Li Qiaoping(Key Laboratory of MEMS of the Ministry of Education,Southeast University,Nanjing 210096,China);A Test System for the in situ Extraction of the Material Parameters of MEMS Thin Films[J];Chinese Journal of Semiconductors;2006-09
China Proceedings of conference Full-text Database 1 Hits
1 Nie Meng Huang Qing'an Li Weihua Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing,210096;Study on In-Situ Poisson's Ratio Measurement of MEMS Membrane[A];[C];2005
【Co-citations】
Chinese Journal Full-text Database 7 Hits
1 LIU Feng-feng,LU Jia-ping(Jiangnan University,Wuxi 214122,China);Study on the Anti-bending Mechanical Performance of Wooden Pallets under Uniformly Distributed Load[J];Packaging Engineering;2008-03
2 Qin Peicheng Zha Xiaoxiong Yu Hang (Civil Engineering of Shenzhen Graduate School,Harbin Institute of Technology Shenzhen 510085);STUDY ON POLYURETHANE FOAM MATERIAL CONSTITUTIVE RELATION AND IT'S APPLICATION IN SANDWICH PANELS[J];Industrial Construction;2008-04
3 DUAN Zhi-yong,HUANG Ming-hui(School of Mechanical and Electrical Engineering,Central South University,Changsha 410083,China);Static analysis of the fluid cylinder of giant hydraulic press bed with finite element method[J];Machinery Design & Manufacture;2007-11
4 QIN Pei-cheng,ZHA Xiao-xiong,YU Hang(Shenzhen Graduate School,Harbin Institute of Technology,Shenzhen 510085,China);Study on Constitutive Relationship Model of Plastic Extrusion Foam Material and Its Application in Sandwich Panels[J];Journal of Building Materials;2008-02
5 CHANG Ming-qi1,2,Senior Engineer LIU Jun-ping3,Assoc.Prof.(1 China Irrigation & Drainage Development Center,Beijing 100054,China2 Shanxi Institute of Water Resources,Taiyuan 030001,China3 College of Civil Engineering & Architecture,Zhejiang University of Technology,Hangzhou 310032,China);Elastoplasticity of Water Resources System and Its Safety Mechanism[J];China Safety Science Journal(CSSJ);2008-04
6 ZHU Xiao-ling1,LIU Qing-tan1,LIU Dong-hai2(1.School of Civil Engineering,Central South University,Changsha,Hunan 410075,China;2.The Second Branch of Zhejiang Provincial Transportation Engineering Construction Group Co.,Ltd.Hangzhou,Zhejiang 310003,China);Stability analysis of higher bridge piers with non-uniform section[J];Journal of University of South China(Science and Technology);2007-04
7 GAO Qi1,ZHANG Xiao-long1,XIE Dong-gang2,YANG La-dao2(1.Xi'an University of Architecture and technology,Xi'an 710055,China;2.China Heavy Machinery Research Institute,Xi'an 710032,China);Theory calculation and analysis of impact coefficient of ladle turret[J];Heavy Machinery;2007-05
China Proceedings of conference Full-text Database 1 Hits
1 HANG Yu HUANG Yu-zhong ZHA Xiao-xiong ZHONG Shan-tong (Civil Engineering,Harbin Institute of Technology Shenzhen Graduate School,Shenzhen 518055,China);Experiment study of tensile capacity of metal rock wool sandwich wall panel connection[A];[C];2007
【Co-references】
Chinese Journal Full-text Database 9 Hits
1 Rong Hua 1,Huang Qing'an 1,Nie Meng 2 and Li Weihua 1(1 Key Laboratory of MEMS of Education Ministry,Southeast University,Nanjing 210096,China) (2 School of Science,Hefei University of Technology,Hefei 230009,China);An Analytical Model for Pull-in Voltage of Doubly-Clamped Multi-Layer Beams[J];Chinese Journal of Semiconductors;2003-11
2 Mei Niansong and Huang Qing'an(Key Laboratory of MEMS of Education Ministry,Southeast University,Nanjing 210096,China);Modeling and Simulation of a Test Structure for Measuring Vertical Fracture Strength of MEMS Film[J];Chinese Journal of Semiconductors;2004-01
3 Xu Gaobin and Huang Qing'an.(Key Laboratory of MEMS of Education Ministry,Southeast University,Nanjing 210096,China);Design and Simulation of On-Line Test Structure for Thermal Conductivity of Polysilicon Thin Films[J];Chinese Journal of Semiconductors;2004-04
4 Nie Meng 1,2,Huang Qing'an 1,Wang Jianhua 2,Rong Hua 1 and Li Weihua 1(1 Key Laboratory of MEMS of Education Ministry,Southeast University,Nanjing 210096,China) (2 School of Science,Hefei University of Technology,Hefei 230009,China);An Electrostatic Actuated Microelectromechanical In-Situ Extracting Method for Material Property of Multi-Layer Film[J];Chinese Journal of Semiconductors;2004-11
5 Zhang Yuxing,Huang Qing’an,and Li Weihua(Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China);A Novel Surface-Micromachined Structure For On-Line Measuring Thermal Expansion Coefficient of Polysilicon Thin Films[J];Chinese Journal of Semiconductors;2005-04
6 Nie Meng,Huang Qing’an,and Li Weihua(Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China);An In-Situ Extracting Method for Residual Stresses of a Multilayer Film by Full-Field Optical Measurement[J];Chinese Journal of Semiconductors;2005-05
7 Liu Zutao,Huang Qing’an,and Li Weihua(Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China);An Optimized Micro-Rotating Structure for Measuring Residual Strain of Thin Films[J];Chinese Journal of Semiconductors;2005-05
8 HU Xiao tang, LI Yuan, RAO Zhi jun, HU Chun guang, FU Xing (State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin University,Tianjin 300072, China);Nanoelectromechanical Systems[J];Nanoteohnology and Precision Engineering;2004-01
9 Zhou Zhaoying,Yang Xing (MEMS Lab.,Department of Precision Instruments & Mechnology,Tsinghua University,Beijing 100084,China);Micro and Nano Electro-mechanic Systems[J];Instrument Technique and Sensor;2003-02
【Secondary References】
Chinese Journal Full-text Database 2 Hits
1 LIU Xudong1,2,ZHU Rong2 ,XU Lijun2,ZHANG Fuxing2,LIU Peng2,ZHOU Zhaoying2 1.Key Laboratory of the Electronic Measurement Technology of the National Defense,North University of China,Taiyuan 030051,China; 2.State Key Laboratory of Precision Measurement Technology and Instruments,Tsinghua University,Beijing 100084,China;Research on Flow Sensor System Integrated with Wing of Micro Air Vehicle[J];Chinese Journal of Sensors and Actuators;2009-07
2 WANG Quanwu1,HU Gang2(1.Beijing Institute of Control Engineering,Beijing 100190,China;2.China Academyof Space Technology,Beijing 100094,China);Analysis and Validation of Flywheel Vibration Spectrum Characteristics[J];Aerospace Control and Application;2008-04
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