Full-Text Search:
Home|Journal Papers|About CNKI|User Service|FAQ|Contact Us|中文
《Chinese Journal of Semiconductors》 2005-04
Add to Favorite Get Latest Update

A Novel Surface-Micromachined Structure For On-Line Measuring Thermal Expansion Coefficient of Polysilicon Thin Films

Zhang Yuxing,Huang Qing’an,and Li Weihua(Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China)  
This paper presents a novel structure for in situ determining thermal expansion coefficient of polysilicon thin films.A thermal-electro-mechanical compliant model is provided and confirmed with ANSYS software and some optimized parameters are also achieved through simulations.The structure has many advantages such as high precision without any particular requirements (vacuum or sealed chamber).Furthermore,the results of test are all presented in electrical form.
【Fund】: 国家高技术研究发展计划资助项目(批准号:2002AA404010)~~
【CateGory Index】: TN386
Download(CAJ format) Download(PDF format)
CAJViewer7.0 supports all the CNKI file formats; AdobeReader only supports the PDF format.
【References】
Chinese Journal Full-text Database 2 Hits
1 Huang Qing’an,Liu Zutao,Li Weihua,and Li Qiaoping(Key Laboratory of MEMS of the Ministry of Education,Southeast University,Nanjing 210096,China);A Test System for the in situ Extraction of the Material Parameters of MEMS Thin Films[J];Chinese Journal of Semiconductors;2006-09
2 Hu Dongmei,Huang Qing'an,and Li Weihua(Key Laboratory of MEMS of the Ministry of Education,Southeast University,Nanjing 210096,China);Structure for Electrical Measurement of the Thermal Expansion Coefficient of Polysilicon Thin Films[J];Journal of Semiconductors;2008-10
【Citations】
Chinese Journal Full-text Database 1 Hits
1 Xu Gaobin and Huang Qing'an.(Key Laboratory of MEMS of Education Ministry,Southeast University,Nanjing 210096,China);Design and Simulation of On-Line Test Structure for Thermal Conductivity of Polysilicon Thin Films[J];Chinese Journal of Semiconductors;2004-04
【Co-citations】
Chinese Journal Full-text Database 1 Hits
1 Huang Qing’an,Liu Zutao,Li Weihua,and Li Qiaoping(Key Laboratory of MEMS of the Ministry of Education,Southeast University,Nanjing 210096,China);A Test System for the in situ Extraction of the Material Parameters of MEMS Thin Films[J];Chinese Journal of Semiconductors;2006-09
【Co-references】
Chinese Journal Full-text Database 10 Hits
1 YUAN Xianghui LU Guolin HUANG Youshu LI Bin (Chongqing University,Chongqing 400044,CHN)$$$$;CMOS readout integrated circuit for IRFPA[J];SEMICONDUCTOR OPTOELECTRONICS;1999-02
2 Zhang Qingchun,Zhang Bin,Wang Xiaobin(Institute of Nuclear Energy Technology,Tsinghua University,Beijing 100084);Research on High Speed Soft Recovery Power Diodes[J];SEMICONDUCTOR TECHNOLOGY;1998-01
3 Yang Yasheng (Chongqing Optoelectronics Research Institute,Chongqing 400060);Bolometer Infrared Focal Plane Arrays[J];SEMICONDUCTOR TECHNOLOGY;1999-02
4 GUO Wei-lian, LIANG Hui-lai, ZHANG Shi-lin, NIU Ping-Juan, MAO Lu-hong, ZHAO Zhen-bo(Shool of Electronic Information Eng.Tianjin University, Tianjin 300072, China)HAO Jing-chen, WEI Bi-hua, ZHANG Yu-qin, SONG Wan-hua, YANG Zhong-yue(Hebei Semiconductor Re;Resonumt tunneling diode[J];Semiconductor Information;2002-05
5 Rong Hua 1,Huang Qing'an 1,Nie Meng 2 and Li Weihua 1(1 Key Laboratory of MEMS of Education Ministry,Southeast University,Nanjing 210096,China) (2 School of Science,Hefei University of Technology,Hefei 230009,China);An Analytical Model for Pull-in Voltage of Doubly-Clamped Multi-Layer Beams[J];Chinese Journal of Semiconductors;2003-11
6 Mei Niansong and Huang Qing'an(Key Laboratory of MEMS of Education Ministry,Southeast University,Nanjing 210096,China);Modeling and Simulation of a Test Structure for Measuring Vertical Fracture Strength of MEMS Film[J];Chinese Journal of Semiconductors;2004-01
7 Xu Gaobin and Huang Qing'an.(Key Laboratory of MEMS of Education Ministry,Southeast University,Nanjing 210096,China);Design and Simulation of On-Line Test Structure for Thermal Conductivity of Polysilicon Thin Films[J];Chinese Journal of Semiconductors;2004-04
8 Rong Hua 1,Huang Qing'an 1,Nie Meng 2 and Li Weihua 1(1 Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China) (2 School of Science,Hefei University of Technology,Hefei 230009,China);A Novel Anchor for Microbeam with Perfect Fixed-End Boundary Conditions[J];Chinese Journal of Semiconductors;2004-06
9 Nie Meng 1,2,Huang Qing'an 1,Wang Jianhua 2,Rong Hua 1 and Li Weihua 1(1 Key Laboratory of MEMS of Education Ministry,Southeast University,Nanjing 210096,China) (2 School of Science,Hefei University of Technology,Hefei 230009,China);An Electrostatic Actuated Microelectromechanical In-Situ Extracting Method for Material Property of Multi-Layer Film[J];Chinese Journal of Semiconductors;2004-11
10 Nie Meng,Huang Qing’an,and Li Weihua(Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China);An In-Situ Extracting Method for Residual Stresses of a Multilayer Film by Full-Field Optical Measurement[J];Chinese Journal of Semiconductors;2005-05
【Secondary References】
Chinese Journal Full-text Database 1 Hits
1 LIU Xudong1,2,ZHU Rong2 ,XU Lijun2,ZHANG Fuxing2,LIU Peng2,ZHOU Zhaoying2 1.Key Laboratory of the Electronic Measurement Technology of the National Defense,North University of China,Taiyuan 030051,China; 2.State Key Laboratory of Precision Measurement Technology and Instruments,Tsinghua University,Beijing 100084,China;Research on Flow Sensor System Integrated with Wing of Micro Air Vehicle[J];Chinese Journal of Sensors and Actuators;2009-07
©2006 Tsinghua Tongfang Knowledge Network Technology Co., Ltd.(Beijing)(TTKN) All rights reserved