Full-Text Search:
Home|Journal Papers|About CNKI|User Service|FAQ|Contact Us|中文
《Chinese Journal of Semiconductors》 2005-05
Add to Favorite Get Latest Update

An Optimized Micro-Rotating Structure for Measuring Residual Strain of Thin Films

Liu Zutao,Huang Qing’an,and Li Weihua(Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China)  
This paper presents an optimized micro-rotating structure for local measurement of residual strain in a thin film.This optimized structure is composed of three cantilever beams with uniform width.An analytical model is derived to relate the measured displacement to residual strain.Finite-element modeling is also used to analyze the model.Experimental results with p-type doped as well as undoped LPCVD polysilicon films demonstrate the effectiveness of the proposed structure.
【Fund】: 国家高技术研究发展计划资助项目(批准号:2003AA404010)~~
【CateGory Index】: TH703
Download(CAJ format) Download(PDF format)
CAJViewer7.0 supports all the CNKI file formats; AdobeReader only supports the PDF format.
【References】
Chinese Journal Full-text Database 1 Hits
1 Huang Qing’an,Liu Zutao,Li Weihua,and Li Qiaoping(Key Laboratory of MEMS of the Ministry of Education,Southeast University,Nanjing 210096,China);A Test System for the in situ Extraction of the Material Parameters of MEMS Thin Films[J];Chinese Journal of Semiconductors;2006-09
【Citations】
Chinese Journal Full-text Database 1 Hits
1 ;In-Situ Test Structures of Micromachined Thin Films[J];Measurement & Control Technology;2002-07
【Co-citations】
Chinese Journal Full-text Database 1 Hits
1 Wang Shasha1,Chen Jing 1,,Li Dachao2,Huang Yubo2,and Li Zhihong1(1 National Key Laboratory of Micro/Nano Fabrication Technology,Institute of Microelectronics, Peking University,Beijing 100871,China) (2 State Key Laboratory of Precision Measurement Technology and Instruments,Tianjin University,Tianjin 300072,China);A Highly Sensitive Local Curvature Metrology for Internal Stress Detection in Thin Films[J];Chinese Journal of Semiconductors;2006-06
【Co-references】
Chinese Journal Full-text Database 7 Hits
1 Rong Hua 1,Huang Qing'an 1,Nie Meng 2 and Li Weihua 1(1 Key Laboratory of MEMS of Education Ministry,Southeast University,Nanjing 210096,China) (2 School of Science,Hefei University of Technology,Hefei 230009,China);An Analytical Model for Pull-in Voltage of Doubly-Clamped Multi-Layer Beams[J];Chinese Journal of Semiconductors;2003-11
2 Mei Niansong and Huang Qing'an(Key Laboratory of MEMS of Education Ministry,Southeast University,Nanjing 210096,China);Modeling and Simulation of a Test Structure for Measuring Vertical Fracture Strength of MEMS Film[J];Chinese Journal of Semiconductors;2004-01
3 Xu Gaobin and Huang Qing'an.(Key Laboratory of MEMS of Education Ministry,Southeast University,Nanjing 210096,China);Design and Simulation of On-Line Test Structure for Thermal Conductivity of Polysilicon Thin Films[J];Chinese Journal of Semiconductors;2004-04
4 Rong Hua 1,Huang Qing'an 1,Nie Meng 2 and Li Weihua 1(1 Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China) (2 School of Science,Hefei University of Technology,Hefei 230009,China);A Novel Anchor for Microbeam with Perfect Fixed-End Boundary Conditions[J];Chinese Journal of Semiconductors;2004-06
5 Nie Meng 1,2,Huang Qing'an 1,Wang Jianhua 2,Rong Hua 1 and Li Weihua 1(1 Key Laboratory of MEMS of Education Ministry,Southeast University,Nanjing 210096,China) (2 School of Science,Hefei University of Technology,Hefei 230009,China);An Electrostatic Actuated Microelectromechanical In-Situ Extracting Method for Material Property of Multi-Layer Film[J];Chinese Journal of Semiconductors;2004-11
6 Zhang Yuxing,Huang Qing’an,and Li Weihua(Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China);A Novel Surface-Micromachined Structure For On-Line Measuring Thermal Expansion Coefficient of Polysilicon Thin Films[J];Chinese Journal of Semiconductors;2005-04
7 Nie Meng,Huang Qing’an,and Li Weihua(Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China);An In-Situ Extracting Method for Residual Stresses of a Multilayer Film by Full-Field Optical Measurement[J];Chinese Journal of Semiconductors;2005-05
【Secondary References】
Chinese Journal Full-text Database 1 Hits
1 LIU Xudong1,2,ZHU Rong2 ,XU Lijun2,ZHANG Fuxing2,LIU Peng2,ZHOU Zhaoying2 1.Key Laboratory of the Electronic Measurement Technology of the National Defense,North University of China,Taiyuan 030051,China; 2.State Key Laboratory of Precision Measurement Technology and Instruments,Tsinghua University,Beijing 100084,China;Research on Flow Sensor System Integrated with Wing of Micro Air Vehicle[J];Chinese Journal of Sensors and Actuators;2009-07
©2006 Tsinghua Tongfang Knowledge Network Technology Co., Ltd.(Beijing)(TTKN) All rights reserved