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《Chinese Journal of Semiconductors》 2005-07
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Fabrication of CMOS Compatible One-Bodied Humidity and Temperature Sensor

Peng Shaohua,Huang Qing’an,Qin Ming,and Zhang Zhongping(Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China)  
A CMOS compatible one-bodied humidity and temperature sensor,including structural dimensions and a humidity sensing model,is presented.The sensor is simulated by the finite element software COVENTOR.A fabrication process for the sensor is presented and the sensor is measured.The theoretical and measured values are compared.Results show that the sensitivity of the sensor is 0.015pF/%RH at 25℃,the capacitance changes about 1.23pF from 15%RH to 95%RH.
【Fund】: 国家高技术研究发展计划资助项目(批准号:2004AA404030)~~
【CateGory Index】: TP212
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