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《Chinese Journal of Semiconductors》 2006-09
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A Test System for the in situ Extraction of the Material Parameters of MEMS Thin Films

Huang Qing’an,Liu Zutao,Li Weihua,and Li Qiaoping(Key Laboratory of MEMS of the Ministry of Education,Southeast University,Nanjing 210096,China)  
A new system for the in situ extraction of the material parameters of MEMS films is presented. The system is composed of three parts,including the layout of testing structures,test equipments,and a software application for analysis and control.Both the test and measurement signals of the test system are electrical,making it compatible with IC testing and capable for rapid testing.The measurement is executed automatically under the control of a computer.
【Fund】： 国家高技术研究发展计划资助项目(批准号:2003AA404010)~~
【CateGory Index】： TB383.2
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1 Nie Meng 1,2,Huang Qing'an 1,Wang Jianhua 2,Rong Hua 1 and Li Weihua 1(1 Key Laboratory of MEMS of Education Ministry,Southeast University,Nanjing 210096,China) (2 School of Science,Hefei University of Technology,Hefei 230009,China);An Electrostatic Actuated Microelectromechanical In-Situ Extracting Method for Material Property of Multi-Layer Film[J];Chinese Journal of Semiconductors;2004-11
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1 ZHANG Yi,LUO Yuan,XU Xiao-dong(School of Automatization,Chongqing University of Posts and Telecommunications,Chongqing 400065,CHN);Analysis and Simulation for Micro-mirror of MEMS Optical Switch Based on Fractal Theory[J];Semiconductor Optoelectronics;2006-06
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