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《CHINESE JOURNAL OF SEMICONDUCTORS》 1999-05
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Investigation on Preparation and Structures of TiO 2 Thin Film

Meng Xianquan, Wang Jun, He Lei, Fan Xiangjun(Accelerator Laboratory, Department of Physics, Wuhan University, Wuhan 430072)  
Abstract TiO 2 thin films are deposited by planar magnetron sputtering. Different film structures and compositions are characterized by X ray diffraction and X ray photoelectron spectroscopy(XPS), when the sputtering conditions such as substrate temperature, oxygen partial pressure, total gas pressure change. The optimum parameters to prepare anatase and rutile poly crystal films are obtained.
【CateGory Index】: O484.1,O484.1
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