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Study of Transparent Conducting ZnO∶Al Films Prepared on Different Organic Substrate

CHEN Yuan 1\ ZHANG Deheng 1\ MA Jin 2\ YANG Tianlin 3 (1. Department of Physics, Shangdong University, 250100;\ 2. Institute of Optoelectronic Materials and Devices,Shandong Unversity, 250100;\ 3. Zibo Inctitute, 255200)  
Transparent conducting ZnO∶Al films with good adhesion, low resistivity and high transmittance have been prepared on different organic substrates by r.f. magnetron-sputtering. The structural, electrical and optical properties of the obtained films were studied.
【Fund】: 国家自然科学基金
【CateGory Index】: TN304.055
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