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《Acta Armamentarii》 2008-06
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A Novel MEMS Single Vector Hydrophone

CHEN Shang,XUE Chen-yang,ZHANG Bin-zhen,XIE Bin (National Key Laboratory for Electronic Measurement Technology,North University of China,Taiyuan 030051,Shanxi,China)  
A novel underwater acoustic receiving transducers—micro-electro-mechanical-system(MEMS) single vector hydrophone was designed and fabricated by means of theory of piezoresistive effect and MEMS technology.It is desirable that the application of piezoresistive effect and ingenious structure to single vector hydrophone may improve the low-frequency sensitivity and its miniaturization.The microstructure of the hydrophone was statically simulated by ANSYS,fabricated and encapsulated by MEMS technology,and measured both by vibration-platform and underwater standing wave field.The experiment results show that fabricating vector hydrophone based on theory of piezoresistive effect and MEMS technology is feasible.This kind of hydrophone has several advantages such as small volume,light weight,simple structure,and directional pattern in the form of "8"with which the acoustic source in underwater horizontal plane can be detected directionally by single vector hydrophone.
【Fund】: 国家自然科学基金资助项目(50405025;50375050)
【CateGory Index】: TB565.1
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