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《Journal of Beijing Institute of Machinery》 2006-04
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Design of a signal detection circuit of silicon micromachined gyroscope

MING Liang,WANG Yin-nian,WANG Jia-guang,ZANG Fu-xue(Sensor Research Center,Beijing Information Technology Institute,Beijing 100101,China)  
A kind of weak output signals detection circuit is presented for micromachined gyroscope driven by carrier.This circuit is based on the vibration characteristics of micromachined gyroscope.By using different amplifiers,a band-pass filter is designed and the AC characteristics of this circuit is analyzed.The final tests show that this circuit can sense the capacitance about 10~(-3)pF level,the minimal resolution reaching 0.1°/s.
【Fund】: 国家自然科学基金项目(60472011);; 北京市传感器重点实验室项目(53062017)
【CateGory Index】: V241.5
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