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《Journal of Beijing University of Aeronautics and Astronautics》 2005-03
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Closed-loop system of silicon resonant pressure micro-sensor

Li Haijuan Zhou Haomin(School of Instrument Science and Opto-electronics Engineering, Beijing University of Aeronautics and Astronautics, Beijing 100083, China)  
When the silicon resonant pressure micro-sensor works in the self-oscillation close-loop system with thermal-excited and resistor detected, its output has a problem of dreadfully weak signal of micro-sensor. SNR( signal noise ratio) is as low as 10~ -3 , for the system used frequency-equaled signal to excite micro-sensor to get its syntony, as well caused the damaging coupling disturbance. PLL(phase-locked loop) principle and frequency-divided technique were used to design the double closed-loop control circuit of micro-sensor to avoid those. Micro-sensor worked in the outside loop and PLL made the inside loop. The frequency output of micro-sensor had frequency-equaled exciting signal and duple frequency true signal, after multilevel power amplification multiplied duple frequency output of PLL to achieve frequency dividing, adjusting the system state parameters made closed-loop available and phase locking. Results show that the closed-loop system of micro-sensor works effectively based PLL principle and frequency-divided technique and the low SNR gets developed.
【Fund】: 航天科学基金资助项目 (0 3B5 1 0 49)
【CateGory Index】: TP212
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