Study on Electro-Thermal Analytical Model of MEMS Multilayer Cantilever Microactuator
JIANG Jian-liang (Department of Optical Engineering, School of Information Science and Technology, Beijing Institute of Technology, Beijing100081, China)
Abstrcat Under the designated condition of operation, the heat transfer equation of the MCMA and its initial condition, boundary conditions are listed, the analytical solution is derived and the electro-thermal analytical model is set up. Comparison is made between the analytical solutions by Matlab software package and the 3-D FEA by ANSYS software package at static/steady state. Around temperature 500 K, for the material layer thicknesses, d_ibL,i=1, 2, 3, the static/steady temperature distribution along the MCMA's width is in uniform and that along its length is not in uniform; the relative error of analytical model compared to FEA can be less than 5%. The 2-D electro-thermal analytical model of the MCMA is effective.