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《Transactions of Beijing Institute of Technology》 2008-11
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Finite Element Analysis and Optical Micro-Scanner Based on Ferroelectric Ceramics

CHEN Wei-li,XU Chao,JIN Wei-qi,WANG Xia,XU Jia-yue(Department of Optical Engineering,School of Information Science and Technology,Beijing Institute of Technology,Beijing 10081,China)  
Optical micro-scanner and its amplifier structure based on ferroelectric ceramics as well as flexible hinge is presented;and the properties of single-axis and flexible hinge analyzed.Finite element method is then used to simulate the flexible hinge magnification of the optical micro-scanner.It shows that when the minimum thickness of flexible hinge is twice the radius of arc,the micro-scanner structure can perform stable displacement,while the magnification ratio is enhanced to 3.25 times the displacement given by ferroelectric ceramics.The rationality of magnifying structure is thus validated exactly.
【Fund】: 国家部委预研项目(A1120060488);; 国家“十一五”计划项目(40405030103)
【CateGory Index】: TH703
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