Development in Preparation of Thin Films by Sol-Gel Method
LI Ning,LU Difen,CHEN Senfeng (Institute of Materials Science and Engineering, South China University of Technology, Guangzhou 510640,China)
The sol-gel technique is a promising method in preparing thin films. In this paper, categories and methods of thin films are briefly introduced. It possesses many advantages, such as the simple process for efficient production of films, compared with PVD and CVD methods. Then the whole procedure and applications of thin films are described in detail. It mainly concentrates on the methods of substrates clearing and techniques of coating.
【CateGory Index】： O484.1