Influence of Temperature on Film Structure and Performance of TiO_2 Prepared with on-Line APCVD
Mo Jian liang (Hang-zhou Lan-xing new material technology Co.,Ltd.,Hang-zhou,310012)
The influence of glass substrate temperature on film structure ,topography , photocatalysis of TiO2 was investigated by simulating on float line APCVD . It is concluded that the relative proportion of various crystalline phase in film was influenced by substrate temperature and the topography and photo-catalytic activity of TiO2 film were significantly affected by the crystalline phases.
【CateGory Index】： TB383.2