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《China Surface Engineering》 2002-03
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Evaluation of hardness measurement methods for thin films

MI Yan-yu, HU Nai-sai, HE Jia-wen, CHEN Hua  
The conventional Vickers hardness measurement for thin films cannot get rid from the influence of substrate and the resolution of small indentation is also poor. Nanoindentor is a modern instrument, which can provide a precise control and accurate measurement of indentation depth. By controlling the indentation depth, the effect of substrate on film hardness can be eliminated. The measure- ment error of indentation depth is much less than that of indent diagonal. However, nanoindentor requires well prepared surface with low roughness of specimen, and this instrument is expensive, that limits its application in industry. One method studied in this paper may be available for some special cases. The composite hardness of coated specimen can be measured by the conventional Vickers hardness tester with relatively heavy load, then the intrinsic hardness of thin film can be calculated using a proper model. This method would be a suitable way for industrial applications.
【Fund】: 国家自然科学基金资助项目(59971035)
【CateGory Index】: TB43
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