Optical Properties of ITO Films
WANG Min1,MENG Ji-long2,CHEN Ming-guang3 (1.Department of Mechantronic Engineering, Guangdong Polytechnic Normal University, Guangzhou 510640; 2. College of Mechanical Engineering, South China University of Technology, Guangzhou 510640; 3. Department of Applied Physics, South China University of Technology, Guangzhou 510640, China)
The preparation of ITO films by sol-gel method and the influence of Sn diffusion, heat-treatment temperature and time on the transmittance of ITO films were studied. Experimental results showed that the transmittance of ITO films decreased slowly when Sn diffusion was less than 10 %,but it decreased sharply when Sn diffusion was beyond 10 %; with the increase of heat-treatment time, the transmittance of ITO films decreased linearly;with the increase of heat-treatment temperature, the transmittance of ITO films increased significantly with the temperature up to 500℃ and then decreased.