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《Surface Technology》 2005-04
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Research Progress in Preparation of the Nano TiO_2 Thin Films

CHENG Xiao-ling~(1,2), HU She-jun~(3), KUANG Tong-chun~(4),ZENG Peng~(2), XIE Guang-rong~(2), RU Qiang~(2)(1.Analytical and Testing Center, Guangdong University of Technology, Guangzhou 510090, China;2.School of Materials and Energy Sources, Guangdong University of Technology, Guangzhou 510090, China;3. School of Physics and Telecommunication Engineering, South China Normal University, Guangzhou 510631, China;4.Analytical and Testing Center, South China University of Science & Technology, Guangzhou, 510640, China)  
Based on the current study state of TiO_(2) functional thin film,the preparation methods of titania thin films including chemical vapor deposition,hydrolysis-precipitation,liquid phase deposition,sol-gel dip-coating,sputtering,ion beam enhanced deposition were reviewed.The advantages and disadvantages of different methods were briefly described.[
【Fund】: 广东省教育厅自然科学基金资助项目(200045)
【CateGory Index】: O614.411
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