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Technology Survey and Development Tendency Investigation on ITO Films

ZHOU Hong-ming~1,YI Dan-qing~1,YANG Xiao-ling~2(1.School of Materials Science and Engineering,Central South University,Changsha 410083,China;2.Department of Chemical and Biological Engineering,College of Chemistry and Chemical Engineering,Xiamen University,Xiamen 361005,China)  
The technology survey and development tendency of ITO films were reviewed.The preparation principles of the main production processes of ITO films were introduced,including DCMS,CVD,Sol-gel process,chemical vapor deposition,spray-pyrolysis and vacuum evaporation,and their merits and demerits were analyzed.Based on the analysis results,the development tendency of production technology of ITO thin film are investigated as follows:(1) Developing the sol-gel process strongly;(2) Further studying their synthesis mechanism and properties;(3) Exploiting their application area;(4) Developing advanced preparation technology of thin film.
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