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《Surface Technology》 2006-06
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Research of ZnO Thin Films Grown by Plasma-enhanced Chemical Vapor Deposition

GUO Ai-bo,LIU Yu-ping,CHEN Feng,LI Bin,DAN Min,LIU Ming-hai,HU Xi-wei(College of Electrical & Electronics Engineering,Central China University of Science and Technology,Wuhan 430074,China)  
The ZnO thin films are fabricated on copper and glass substrates with plasma-enhanced chemical vapor deposition because of its multifunction.SEM is used to obtain the surface morphology of ZnO,EDAX is used to analyze the element types and the relative contents of atoms,the peaks of Zn and O are observed obviously by the EDAX results,and the ratio of the Zn and O atoms is approximately 1∶1;XPS results show that the zinc and oxygen of the samples exist as compounds instead of the single atom of zinc and oxygen;So the zinc oxygen is fabricated successfully on copper and glass substrates.But the ZnO thin films on Copper are apt to absorb the oxygen and vapor through atmosphere,the quality of ZnO thin films will be improved by fabricating a suitable buffer layer.
【CateGory Index】: O484.1
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