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《Surface Technology》 2012-02
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A Review of Vacuum Arc Deposition and Its Application in Hardness Films

QIU Jia-wen1,ZHAO Dong-cai2(1.China Academy of Space Technology,Beijing 100094,China;2.Science and Technology on Surface Engineering Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China)  
The progress of vacuum arc deposition has been discussed from arc mode of operation and the technology of macroparticles filter,and then,the application and progress in hardness films,such as ta-C,CNx,nitride,oxide and advanced films,have been described.The aim of this paper is providing a reference in vacuum arc deposition and its application for researchers in our nation.
【CateGory Index】: TB43
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