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《Surface Technology》 2012-05
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Photoelectric Properties of ITO Thin Film Deposited by Energy Filtered DC Magnetron Sputtering at Low Temperature

FAN Li-hong1,WANG Chao-yong1,2,LU Zhong-jie1,GUAN Rui-hong1,YAO Ning1(1.Physical Engineering College,Zhengzhou University,Zhengzhou 450052,China;2.Department of Mathematics and Physiscs,Henan University of Urban Construction,Pingdingshan 467036,China)  
The indium tin oxide(ITO) thin films were deposited on glass substrates by energy filtering magnetron sputtering(EFMS) at low temperature.The effects of different filtering electrode mesh,sputtering power and the temperature of the substrates on the photoelectric properties of ITO films were studied.The results show that we can received the ITO thin films have a resistivity of 4.9×10-4 Ω·cm and transparency of 87% in the visible wavelength region,when the mesh of filtering electrode for 60 mesh,the temperature of the substrates for 81 ℃ and sputtering power for 165 W.
【Fund】: 国家自然科学基金资助项目(61076041)
【CateGory Index】: TN305.92
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【Citations】
Chinese Journal Full-text Database 10 Hits
1 ZHOU Hong-ming~1,YI Dan-qing~1,YANG Xiao-ling~2(1.School of Materials Science and Engineering,Central South University,Changsha 410083,China;2.Department of Chemical and Biological Engineering,College of Chemistry and Chemical Engineering,Xiamen University,Xiamen 361005,China);Technology Survey and Development Tendency Investigation on ITO Films[J];Surface Technology;2006-01
2 LIN Hui, JIANG Ya-dong, YU Jun-sheng, LI Jun-jian, WANG Jun, DENG Jian-fang(School of Optoelectronic Information,State Key Laboratory of Thin Solid Films and Integrated Devices,University of Electronic Science and Technology of China (Chengdu 610054,China);Fabrication of Low-temperature ITO Thin Film and Its Application in TOLEDs[J];Journal of Optoelectronics.Laser;2007-09
3 WANG Sheng-hao,ZHANG Jing-quan,WANG Bo,FENG Liang-huan,CAI Ya-ping,LEI Zhi,LI Bing,WU Li-li,LI Wei,ZENG Guang-gen,ZHENG Jia-gui,CAI Wei(College of Materials Science & Engineering,Sichuan University,Chengdu 610064,China);Influence of dc power and oxygen partial pressure on the electrical and optical properties of indium-tin-oxide films[J];Journal of Functional Materials;2009-05
4 HOU Jianhua1,LIU Juan1,ZHANG Yujuan2 (1.School of Materials Science and Engeering,Changchun University of Science and Technology,Changchun 130022; 2.Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033);Review of Top-emitting White Organic Light-Emitting Devices[J];Journal of Changchun University of Science and Technology(Natural Science Edition);2010-03
5 XIA Dong-lin,YANG Sheng,WANG Shu-lin,ZHAO Xiu-jian (Key Laboratory for Silicate Materials Science and Engineering,Ministry of Education,Wuhan University of Technology,Wuhan 430070,China);Study on Optical and Electrical Properties of ITO Thin Films Deposited by DC Reactive Magnetron Sputtering[J];Journal of Synthetic Crystals;2006-02
6 REN Bing-yan1,LIU Xiao-ping 1,2,LI Yan-lin 1,WANG Min-hua1,2,YANG Jian-kun 1,XU Ying 2(1.School of Material Science and Engineering,Hebei University of Technology,Tianjin 300130,China;2.Beijing Solar Energy Research Institute,Beijing 100083,China);Effects of Sputtering Pressure on the Properties of Indium Tin Oxide[J];Journal of Synthetic Crystals;2007-04
7 DENG Jian-fang, LI Jun-jian, YANG Jian-jun(School of Opto-Electronic Information, University of Electronic Science and Technology of China, Sichuan Chengdu 610054, China);Low Temperature Deposition and Photoelectric Properties of ITO Films[J];Advanced Display;2005-12
8 Yao Ning1,2,Chang Lihong2,Han Changbao2,Xing Hongwei2,Ge Yashuang2,Cui Nana2,Wang Yingjian1,Zhang Binglin2 (1.Anhui Institute of Optics and Find Mechanics,Chinese Academy of Sciences,Hefei 230031,China;2.Department of Physics,Zhengzhou University,Zhengzhou 450052,China);Growth and Characterization of Indium-Tin-Oxide Films by Energy Filtered DC Magnetron Sputtering[J];Chinese Journal of Vacuum Science and Technology;2011-03
9 Li Yunqi, Guan Kuizhi, Xu Chenghai, Wang Baoxia and Zhang Shiwei Northeast University of Technology;Production and application of ITO film with Small Square Resistance[J];Vacuum;1991-04
10 LI Quan-you,YAO Ning,ZHANG Bing-lin,GE Bao-quan,WANG Zhi-qian(Department of Physics and Key Laboratory of Material Physics MOE China,Zhengzhou University,Zhengzhou 450052,China);Optical and electrical properties of ITO thin films deposited by DC magnetron sputtering at room temperature[J];Vacuum;2008-01
【Co-citations】
Chinese Journal Full-text Database 10 Hits
1 ZHANG Guan-li,WU Jian-hua,HUO Zhong-qi,ZHANG Xiao-feng(Beijing Institute of Aeronautical Materials,Beijing 100095,China);Properties of Transparent Conductive Film with Acrylic Resin Coating[J];Journal of Materials Engineering;2011-08
2 XIN Rongsheng1,LIN Yu 2,JIA Xiaolin 1 (1.College of Material Science and Engineering,Zhengzhou University,Zhengzhou 450052,China;2.Department of Chemistry,Henan Education Institute,Zhengzhou 450014,China);Effect of technological conditions on the electrical and optical properties of flexible ITO films[J];Electronic Components and Materials;2009-06
3 ZHANG Qing-feng,GU Jin-hua,GUO Xue-jun,ZHEN Wen,LU Jing-xiao (Key Laboratory of Material Physics of Ministry of Education,School of Physical Engineering,Zhengzhou University,Zhengzhou 450052,CHN);The Improvement of ITO Thin Film Through Rapid Optical Annealing[J];Optoelectronic Technology;2008-01
4 XIE Ke,CAI Hong-kun,TAO Ke,HU Ju-tao,ZHANG De-xian(College of Information Technical Science,Nankai University,Tianjin 300071,China);Characteristics of ZnO:Ga thin films on flexible PEN substrate with DC magnetron sputtering[J];Journal of Optoelectronics.Laser;2011-11
5 DONG Ke-yan,ZHOU Ming,WANG Jing-jing,WU Xiao-lin,GAO Chuan-yu (Center for Photon Manufacturing Science and Technology,Jiangsu University,Zhenjiang 212013,China);Production and properties of ITO transparent conductive film glass[J];Journal of Functional Materials;2011-S2
6 ZHAO Jia-ming1,BIAN Ji-ming1,SUN Jing-chang2,ZHANG Dong1, LIANG Hong-wei1,LUO Ying-min1 (1.School of Physics and Optoelectronic Technology,Dalian University of Technology,Dalian 116024,China; 2.School of Physics and Electronic Technology,Liaoning Normal University,Dalian 116029,China);Growth and transparent conductive properties of ITO films on flexible polyimide(PI) substrates[J];Journal of Functional Materials;2011-S4
7 ZHAO Wenya,JIANG Hongchuan,CHEN Yinzhi,ZHANG Wanli,PENG Shaolong(State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,Chengdu 610054,China);Effects of fabricating technology on the resistivity and the depositing rate of ITO thin films[J];Electronic Components and Materials;2012-08
8 LIN Yu1,LI Hui-ling1,WANG Yu-ting1,XIN Rong-sheng2,JIA Xiao-lin2(1.Department of Chemistry,Henan Institute of Education,Zhengzhou 450046,China;2.College of Material Science and Engineering,Zhengzhou University,Zhengzhou 450052,China);Preparation and photoelectric properties of the Low Temperature ITO Thin Films[J];Journal of Henan Institute of Education(Natural Science Edition);2010-02
9 ZHANG Xiao-lei1,2,SUN Wei-guo1,2,LU Zheng-xiong2 ,ZHANG Liang2,ZHAO Lan2,MENG Chao2,DING Jia-xin2 (1.School of Material Science and Engineering,Northwestern Polytechnical University,Xi′an 710072,China; 2.China Airborne Missile Academy,Luoyang 471009,China);Photoelectron characteristics of ITO/HgInTe Schottky contact[J];Infrared and Laser Engineering;2008-04
10 DONG Guo-yi,TIAN Shuai,YAO Jin-bao,LI Zhe,HU Zhi-peng,WEI Zhi-ren(College of Physics Science and Technology,Hebei University,Baoding 071002,China);In_2O_3 Crystals with Pure Cubic Bixbyite Structure Synthesized by Hydrothermal Method[J];Journal of Synthetic Crystals;2008-06
【Secondary Citations】
Chinese Journal Full-text Database 10 Hits
1 CHEN Meng, BAI Xue\|dong, HUANG Rong\|fang and WEN Li\|shi(Institute of Metal Research, The Chinese Academy of Sciences, Shenyang\ 110015, China)Received 10 December 1998, revised manuscript received 20 March 1999;Structure and Conductive Mechanism of ITO and ZAO Films[J];CHINESE JOURNAL OF SEMICONDUCTORS;2000-04
2 Ma Jin, Zhao Junqing, Li Shuying, Ma Honglei(Institute of Optoelectronic Materials and Devices, Shandong University, Jinan 250100);Structural and Conductive Properties of ITO Films Deposited on Organic Substrate[J];CHINESE JOURNAL OF SEMICONDUCTORS;1998-11
3 ZHANG Ju?bao, WENG Wen?jian, DU Pi?yi, ZHAO Gao?ling, ZHANG Xi?wen, SHEN Ge, HAN Gao?rong (Department of Materials Science and Engineering, Zhejiang University, Zhejiang Hangzhou 310027,China);Glass Coatings by Spray Pyrolysis[J];Glass & Enamel;2002-02
4 WANG Shulin,XIA Donglin (The Key Laboratory of Silicate Materials Science and Engineering, Ministry of Education, China, Wuhan University of Technology, Wuhan 430070, P.R. China);Fabrication Techniques and Development of ITO Film[J];Glass & Enamel;2004-05
5 WANG Min, MENG Ji-long(Department of Mechano - electronic Engineering, South China University of Technology, Guangzhou 510640, China);Development of Transparent Conductive Oxide Films[J];Surface Technology;2003-01
6 ;Semiconducting Mechanism, Aplications and Fabrication of ITO Films[J];Materials Review;1997-04
7 ZHU Dongsheng ZHAO Zhaohui WU Huijun LI Jun (Key Laboratory of Enhanced Heat Transfer & Energy conservation, Ministry of Education, South China University of Technology, Guangzhou 510640, China);Advances in Synthesis of Nano-thin Films by Sol-gel Method[J];Materials Review;2003-S1
8 Ding Xingzhao;He Yizhen(Institute of Solid State Physics,Academia Sinica)Dong Yuanda(Shanghai University of Technology);Applications of Sol-Gel Technique in Material Science[J];MATERIALS SCIENCE AND ENGINEERING;1994-02
9 Yang Meng, Diao Xungang, Liu Haiying, Wang Tianmin (Beihang University, Beijing 100083, China);Influence of Heat Treatment in Different Atmospheres upon Optical and Electrical Properties of ITO Films[J];Rare Metal Materials and Engineering;2005-10
10 MENG Zhi-guo~1, PENG Hua-jun~2, WU Chun-ya~(1), LI Juan~1, XIONG Shao-zhen~1, QIU Cheng-feng~2, LI Juan-juan~2, WANG Wen~2, GUO Hai-cheng~2(1.Institute of Photo-Electronics,Nankai University,Tianjin 300071,China; 2.Department of Electrical and Electronic Engineering,Hong Kong University of Science & Technology,Kowloon Hong Kong,China);Room Temperature Deposition of Thin-film Indium-tin Oxide on Micro-fabricated Color Filters and Its Application to Flat-panel Displays[J];Journal of Optoelectronics.laser;2005-02
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