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《Journal of Beijing Institute of Graphic Communacation》 2003-04
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Study on Radio Frequency Plasma Self\|voltage and the Influence on Polymer

PANG Hua, GE Yuan-jing, ZHANG Yue-fei, ZHANG Guang-qiu (Beijing Institute of Graphic Communication, Beijing 102600, China)  
The occurrence of radio frequency plasma self\|voltage, the relation among electron temperature,electron density and self\|voltage and the influence on plasma polymer qualities are analyzed through the experiment. At the same time the mechanism of radio frequency plasma self\|voltage is discussed. Experiment results show qualities of plasma polymer are obviously improved, as electron temperature and electron density are increased by self\|voltage. Appropriate self\|voltage should be chosen according to the device when films are prepared by plasma polymerization.
【CateGory Index】: O531
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