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Effect of O_2 Concentration and Substrate Temperature on the Optical Properties of Transparent Conductive Cd 2SnO 4 Thin Films

DONG Yu feng WANG Wan lu LIAO Ke jun Wu Bin (Department of Applied Physics,Chongqing University,Chongqing 400044)  
In this paper, we report the optical properties of transparent conductive cadmium stannate (Cd 2SnO 4)thin films prepared by reactive sputtering in Ar+O 2 atmosphere as a function of wavelength, including the discussing of optical transmittance T, extinction coefficient k and refractive index n. Experimental results indicated that the transmittance T and refractive index n of CTO films are increased with the increasing of oxygen concentration and substrate temperature, while the extinction coefficient k is decreased. The experimental results are also discussed with the theories of crystal struture and the variation of the defect concentration.
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