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《Journal of Chongqing University of Posts and Telecommunications(Natural Science Edition)》 2009-06
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Optical property of Al doped ZnO thin films

LI Li1,LIU Su-fang2,JIANG Sha1,LIU Zi-Yi3(1.College of Mathematics and Physics,Chongqing University of Posts and Telecommunications,Chongqing 400065,P.R.China;2.Department of Information Engineering,Zhengzhou Railway Vocational and Technical College,Zhengzhou 450052,P.R.China;3.College of Photoelectric Engineering,Chongqing University of Posts and Telecommunications,Chongqing 400065,P.R.China)  
In this paper,high quality of AZO thin films were prepared by direct current(DC) reactive magnetron sputtering using a Zn target(99.99%) containing Al of 1.5%.The obtained films were characterized and analyzed by ultraviolet-visible and infrared light spectrophotometer.The refractive index and thickness of AZO thin films were theoretically analyzed.The spectral measurements of the films indicate that the average value of the optical transmittance of the films in the visible region exceeds 80%.There is a strong absorption of AZO thin films in the ultraviolet region.The reflectance of AZO thin films in the infrared region is up to 70%.The thickness of AZO thin films is 101 nm,which coincides with the measurement results of step profiler.
【Fund】: 重庆邮电大学青年教师科技基金项目资助(A2007-37);; 重庆市教委科学技术研究项目资助(KJ090514)
【CateGory Index】: TN304.21
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