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《Journal of Chengdu University(Natural Science Edition)》 2006-03
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Numerical Modeling of Low-pressure Discharge in Plasma

HU Qing~(1,2),MENG Lin~1,YAN Yang~1,GAO Rong~1,YUAN Jiade~1(1.School of Physics Electronics,UESTC,Chengdu 610054,China;2.Department of Electronic Information Engineering,Chengdu University,Chengdu 610106,China)  
The review of various kinds of numerical modeling of low-pressure plasma discharge helps us understand many unexplainable phenomena based on numerical modeling.Meanwhile,it also provides research methods of low-pressure plasma in industrial applications,such as plasma processing,gas laser and so on,and applications in micro-electronic,material preparation,environmental protection,aerospace industry and military,etc.
【Fund】: 国家自然科学基金资助项目(编号:60571078);; 国家重点实验室基金资助项目
【CateGory Index】: O53
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