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《长春理工大学学报》 2006-04
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Fabrication Technology of Microlens Array by Melting Photoresist

REN Zhibin~1,ZHU Lisi~2,ZENG Hao~3,JIANG Huilin~1(1.Institute of Space Optical Electronic Technology,Changchun University of Science and Technology,Jilin Changchun 130022;2.Institute of Opto-Electronics Information,Changchun University of Science and Technology,Jilin Changchun 130012;3.Institute of Opto-Electronics Engineering,Changchun University of Science and Technology,Jilin Changchun 130022)  
The technique of fabrication of microlens array by means of melting photoresist is introduced in this paper.Its principle,techniques process and critical techniques are illustrated and some experimental results are presented in this paper.The results show that the technology of melting photoresist is a simple and practical technology of fabricating microlens array.The results of this paper could provide references for the further study of microlens array and its industrialization.
【Fund】: 吉林省科技发展计划资助项目(20060523)
【CateGory Index】: TH74
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