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《Journal of Transcluction Technology》 2001-01
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The System Design Technology of Silicon Accelerometer

PENG Bo, WANG Lu, CHEN Xuedong (Electronic Engineering Research Institute of China Academy of Engineering Physics,Mianyang, Sichuan\ 621900 P.R.C.)  
By introducing the design of the force balance silicon accelerometer,this paper describes the ideas and methods of the MEMS products. The effective links of the micro structure and the electronics which are interdependent ensures the final performance of the whole system. So it is the design rule of a hybrid system that considers in system and designs in double.
【CateGory Index】: TH824.4
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【References】
Chinese Journal Full-text Database 4 Hits
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1 PENG Bo, HE Xiaoping, SU Wei (Electronic Engineering Research Institute of China Academy of Engineering Physics, Mianyang, Sichuan 621900, China);A Micro-machined Electrostatic Servo Accelerometer[J];JOURNAL OF CHINESE INERTIAL TECHNOLOGY;2000-01
【Co-citations】
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1 ZHAO Yu,GAO Guo-wei,WANG Chao,ZHANG Jun,PAN Xue(Department of Electronic Information Engineering,Beijing Information Technology Institute,Beijing,100101,China);Design of automatic zero adjustment of CANbus inclinometer[J];Journal of Beijing Institute of Machinery;2007-04
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3 PAN Wu, ZHANG Yu (Institute of Micro-Optic-Electro-Mechanical Systems, Chongqing University of Posts and Telecommunications, Chongqing 400065, China);Design and Analysis of a Three-Axis Micro Accelerometer with Force Balance Feedback[J];Nanotechnology and Precision Engineering;2006-02
4 PENG Bo,YUAN Ming-quan(Electronic Engineering Research Institute of China Academy of Engineering Physics, Mianyang 621900,China);The Technology of the High Performance Accelerometer Based on Wet Etching Bulk Silicon[J];Journal of Detection & Control;2005-05
5 LIU Wan-guo1, YANG Gong-liu1, XIAO Qian2 (1. Tianjin Navigation Instrument Research Institute, Tianjin 300131, China; 2. School of Automation, Harbin Engineering University, Harbin 150001, China);Application of Small Capacitance Measuring Techniques in Gravimeter[J];Journal of Chinese Inertial Technology;2005-01
6 LI Li,ZHANG Chun-xi,LIN Heng,LIU Hui-lan(Institute of Instrument Science & Opt_electronic Engineering,Beijing University of Aeronautics and Astronautics,Beijing 100083,China);Micro-Mechanical Electrostatic Servo Accelerometer Based on Double Fiber Fabry-Perot Interferometers[J];Journal of Chinese Inertial Technology;2005-06
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1 FU De-sheng,SU Wei,PENG Bo (Institute of Fluid Physics, China Acadeny of Engineering Physics, Mianyang 621900,China);The analysis of some mechanical characteristics on capacitive micro-accelerometer[J];Journal of Anhui University of Technology and Science;2003-04
2 WU Ying,JIANG Yong-qing,WEN Zhi-yu,HU Song (Optoelectronic Engineering College,Chongqing University , Chongqing 400044,China)$$$$;Structure optimization design of silicon micro capacitive accelerometer[J];SEMICONDUCTOR OPTOELECTRONICS;1999-04
3 MA Bin, CHEN Ming-xiang,ZHANG Hong-hai,LIU Sheng,WANG Xue-fang Institute of Microsystems, Huazhong University of Science and Technology, Wuhan 430074, China; State Key Lab. of Laser Technology, Wuhan 430074, China; Mechanical Engineering Department Wayne State University Detroit, Ml 48202, USA;Analysis of Silicon Bonding Technics Based on Laser Interferometry[J];Semiconductor Technology;2005-10
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【Secondary References】
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1 JIN Tong,ZHAO Xin,TAN Yi-yong,SUN Guang-yi,LU Gui-zhang (Institute of Robotics and Information Automatics System,Nankai University,Tianjin 300071,China );Design and Virtual Fabrication Process of a New Kind of Capacitive Accelerometer[J];Chinese Journal of Sensors and Actuators;2006-05
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4 HUANG Shu-qin1,HAO Yong-ping1,ZHANG De-zhi2,WANG Jian2 (1. CAD/CAM Technique Research and Development Center, Shenyang Ligong University, Shenyang 110168, China; 2. Department of Equipment Engineering,Shenyang Ligong University, Shenyang 110168, China);Structural Design and Simulation of Multi-finger Capacitive Micro-accelerometer[J];Journal of Detection & Control;2004-04
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