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《Journal of Transcluction Technology》 2002-04
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New Small Capacitance Measuring Circuit for Capacitance Sensor

WANG Lei, WANG Baoliang, JI Haifeng, HUANG Zhiyao, LI Haiqing (National Key Laboratory of Industrial Control Technology, Institute of Automation Instrumentation, Department of Control Science and Engineering, Zhejiang University, Hangzhou 310027, P.R.China)  
A new small capacitance measuring circuit based on charge amplifier principle was developed for capacitance sensor. The advantages of this circuit are stray immune, high resolution because of no effect of charge injection and high data acquisition rate because of no filter in this circuit. Test results show that the linearity of this circuit is good, the sensitivity of 4.8 mV/fF and resolution of 0.5 fF can be achieved.
【Fund】: 浙江省自然科学基金资助项目 ( 60 0 0 94) ;; 国家自然科学基金重大资助项目 ( 59995460 -5) ;; 国家“八六三”计划专项经费资助项目 ( 2 0 0 1AA413 2 10 )
【CateGory Index】: TP212.1
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