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《Chinese Journal of Sensors and Actuators》 2006-04
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High Performance Interface Circuit for MEMS Gyroscope

WANG Hui-quan~1,YU Fa-xin~ 1 ,JIN Zhong-he~1,ZHENG Xu-dong~1,CHEN Yong~2,JIAO Ji-wei~2,WANG Yue-lin~2 1. Dept. Information and Electronic Eng., Zhejiang University, Hangzhou 310027,China; 2. Shanghai Institute of Micro-system and Information Technology, Shanghai 200050,China  
Interface circuit for a MEMS gyroscope is optimized, which includes a close-loop driven circuit and a detected circuit. Output of the gyro is very low that the interface circuit followed it is very important. By carefully designing the interface circuit followed the gyro, the automatic gain control circuit in the close-loop driven circuit and the detected circuit, performance of the system is improved, the gyro’s resolution reaches 180°/h, with scale factor 9.8 mV/~ (o) ·s~ -1 , nonlinearity 0.43%.
【Fund】: 国家自然科学基金资助(60476033)
【CateGory Index】: V241.5
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