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《Chinese Journal of Sensors and Actuators》 2006-05
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Fabrication of Micro/nano Structures Using Mechanical Scratching Method with AFM Tip

YAN Yong-da, SUN Tao, DONG Shen (Harbin Institute of Technology, Harbin 150001,China)  
To study novel methods for fabricating micro/nano and MEMS/NENS structure on the nanometer scale, based on AFM reconstructed system, mechanical scratching mechanism with an AFM tip, effects of positioning accuracy, AFM modes and tip geometry are investigated. Complex Chinese Character “哈工大” are fabricated and treated as an example to explain how to obtain coordinates of the structure. Simultaneously, a gear shape and two-dimensional structures are machined. Results show that AFM-based mechanical scratching technique can be applied in the fields of fabrication of micro/nano structures.
【Fund】: 国客自然基金项目资助(50575058 50275039);; 哈尔滨工业大学校基金资助(HIT.2002.23)
【CateGory Index】: TH703
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【References】
Chinese Journal Full-text Database 1 Hits
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【Citations】
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【Co-citations】
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1 ZHOU Zhi-tao1,WANG Hai-rong(1,3),JIANG Zhuang-de1,Liu Chong2(1.Institute of Precision Engineering,Xi'an Jiaotong University,Xi'an,710049,China;2.Dalian University of Technology,Dalian 116024,China;3.State key laboratory of precision measuring technology and instruments(Tianjin University and Tsinghua University),Tianjin,300072,China));TiN coating/glass substrate system fabricated for hot-embossing stamp at sub-micron scale[J];Journal of Functional Materials and Devices;2008-01
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1 SUN Tao,YAN Yong da,XIA Jia fei, LIANG Ying chun,CHEN Kai,DONG Shen (Precision Engineering Research Institute,Harbin Institute of Technology,Harbin 150001,China);Study on the processing technique of microstructure based on AFM[J];Micronanoelectronic Technology;2003-Z1
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