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《Chinese Journal of Sensors and Actuators》 2006-05
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Structure Design and Optimization of MEMS Micro Tactile Probe for NMM

LI Yuan,LI Da-chao,HU Xiao-tang,ZHAO Da-bo,GUO Tong,CHEN Jin-ping (State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China)  
To improve the performance of MEMS micro tactile probe, the structure design and parameter optimization of probe are developed. According to the design demands of all parts of probe, several topological structures of suspending parts are presented. Based on mechanic analytic module of probe, affect mechanism of probe performance by structure parameters is presented, as the result, dimensional parameters of stylus, intermediate body, and beam are emulated and optimized. The appropriate parameters and stress curves that meet the probe’s performance requirements are acquired.
【CateGory Index】: TH703
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