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《Chinese Journal of Sensors and Actuators》 2006-05
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An Interface Circuit for Capacitive Vibratory Microgyroscopes

JIANG Qing-hua,YUAN Wei-zheng,CHANG Hong-long (Micro&Nano System Laboratory, Northwestern Polytechnical University,Xi`an 710072 ,China)  
In order to achieve a high sensitivity and low drift,capacitive vibratory microgyroscopes need a very sensitive detection scheme. This paper presents an interface circuit for capacitive vibratory microgyroscopes including the detection bridge and the signal conditioning. The bridge consists of the differential driving capacitors, which is driven by two reverse ac signals consisting of one high frequency carrier voltage and the driving voltage. The other half bridge of sensing has the similar configuration. Two half-bridges share the same output node which is connected to the capacitances-to- voltage circuit based on virtual ground technology. Since the driving and the sensing using the different high frequency carrier voltage, Band pass filters is used to separate these two signals. Using the commercial operational amplifiers and demodulators, the experiments indicate that the circuit can effectively prevent the influence of stray capacitance and suppress the couplings of the driving and sensing signal. The capacitance resolution can reach 10~ -15 F.
【Fund】: 国家自然科学基金项目资助(50505038)
【CateGory Index】: TH703
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