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《Chinese Journal of Sensors and Actuators》 2006-06
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Detecting Circuits for the Micro Accelerometer with Capacitance Detection

YANG Miao-miao,CHEN De-yong*,WANG Jun-bo,CHEN Jian,WU Zeng-wei,CHEN Li(State Key Lab of Transducer Technology,Institute of electronics,Chinese academy of sciences,Beijing 100080,China)  
Due to the parasitic capacitance and weak output signal,which is limited by its dimensions,it is difficult to improve the resolution and stability of micro accelerometer efficiently.Two most popular methods on the measurement of tiny capacitance signal are discussed and compared,and a novel ameliorated capacitance detecting circuit is proposed.A micromachined capacitive accelerometer is developed and measured with the novel detecting approach.The resulting sensitivity is about 1.63 V/g_n,and a capacitance resolution of 10-17 F can be achieved.
【CateGory Index】: TP212.1
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