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《Chinese Journal of Sensors and Actuators》 2006-06
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Detecting Circuits for the Micro Accelerometer with Capacitance Detection

YANG Miao-miao,CHEN De-yong*,WANG Jun-bo,CHEN Jian,WU Zeng-wei,CHEN Li(State Key Lab of Transducer Technology,Institute of electronics,Chinese academy of sciences,Beijing 100080,China)  
Due to the parasitic capacitance and weak output signal,which is limited by its dimensions,it is difficult to improve the resolution and stability of micro accelerometer efficiently.Two most popular methods on the measurement of tiny capacitance signal are discussed and compared,and a novel ameliorated capacitance detecting circuit is proposed.A micromachined capacitive accelerometer is developed and measured with the novel detecting approach.The resulting sensitivity is about 1.63 V/g_n,and a capacitance resolution of 10-17 F can be achieved.
【CateGory Index】: TP212.1
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【Co-citations】
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1 HE Wei-hong,LU Li-xin(Jiangnan University,Wuxi 214122,China);Stress Analysis and Design of Wooden Pallet Plank[J];Packaging Engineering;2008-02
2 XIAO Ding-bang,HOU Zhan-qiang,XIE Li-qiang,WU Xue-zhong,LI Sheng-yi*(National University of Defense Technology,Changsha,Hunan 410073,China);A Novel Method for Measuring the Frequency Responses of Capacitive Micro-Inertial Devices Based on the Second Harmonic Detection[J];Chinese Journal of Sensors and Actuators;2009-01
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7 HU Jia- guo (School of Electrical Engineering & Information, Anhui University of Technology, Ma'anshan 243002,China);Theoretical Model of High Speed Milling Force & Secure Analysis of Milling Tool[J];Journal of Anhui University of Technology;2005-04
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10 YAO Yao, WU Xiu - e (Anshan University of Science and Technology, Anshan 114044, China) CHEN Feng -mei (Machinery Reseach Institute of Liaoning Province, Shenyang 110032, China);The design of hydraulic universal material testing machine's the data prccessing system[J];Machinery Design & Manufacture;2005-06
【Co-references】
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1 ZHANG Qing-yong(Huainan Xicheng Water Affairs Co.Ltd.,Huainan 232001,China);Fault Diagnosis and Maintenance on Machinery in Coal Mines[J];Journal of Anhui Science and Technology University;2006-05
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