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Design of Differential Capacitance Detection Circuit

WANG Ling*,LIU Jun,SHI Yun-bo(National Key Lab for Electronic Measurement and Technology,North university of China,Taiyuan 030051,China)  
A circuit to detect the micro-differential capacitance was designed,which can be successfully applied in the capacitive MEMS devices.The circuit mainly was composed of a generator circuit of rectangle wave,phase sensitive demodulation and low pass filter circuit.This circuit was simply and easy to integrate,it has a good anti-disturbed ability,the main component is amplifier,through the choice of the amplifier,can get the ideality wave.Experiment results shown it precision can reach 10-16F.
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