Full-Text Search:
Home|Journal Papers|About CNKI|User Service|FAQ|Contact Us|中文
《Chinese Journal of Sensors and Actuators》 2006-06
Add to Favorite Get Latest Update

Design of Differential Capacitance Detection Circuit

WANG Ling*,LIU Jun,SHI Yun-bo(National Key Lab for Electronic Measurement and Technology,North university of China,Taiyuan 030051,China)  
A circuit to detect the micro-differential capacitance was designed,which can be successfully applied in the capacitive MEMS devices.The circuit mainly was composed of a generator circuit of rectangle wave,phase sensitive demodulation and low pass filter circuit.This circuit was simply and easy to integrate,it has a good anti-disturbed ability,the main component is amplifier,through the choice of the amplifier,can get the ideality wave.Experiment results shown it precision can reach 10-16F.
【Fund】: 武器装备预先研究项目资助(514090304B0401);; 山西省自然科学基金资助(20051040):“新世纪优秀人才支持计划”(NCET-04-0259)
【CateGory Index】: TM934.2
Download(CAJ format) Download(PDF format)
CAJViewer7.0 supports all the CNKI file formats; AdobeReader only supports the PDF format.
【References】
Chinese Journal Full-text Database 4 Hits
1 YAN Bo,ZENG Wei,GAO FengNational Microanalysis Center,Fudan University,Shanghai 200433,China;A Delta-Sigma Modulator with Non-Delay Integrator for Capacitance Detection[J];Chinese Journal of Sensors and Actuators;2009-11
2 YAO Fenglin1,2,GAO Shiqiao1 1.School of Mechanical and Electronic Engineering,Beijing Institute of Technology,Beijing 100081,China; 2.School of Mechanical and Electronic Engineering,Taiyuan University of Science and Technology,Taiyuan 030024,China;The Calculation Method of the Electrostatic Drive Force of Micro Machined Groscope Comb[J];Chinese Journal of Sensors and Actuators;2011-09
3 WEN Xingxi;LI Xin'e;WANG Meilin;National Key Laboratory for Electronic Measurement Technology,North University of China;Key Laboratory of Instrumentation Science and Dynamic Measurement,North University of China;;Design of Light Trigger Electronic Manometer[J];Chinese Journal of Sensors and Actuators;2014-05
4 Chen Jinjun,Wang Li(College of Electrical Engineering,Guizhou University,Guiyang 550003,China);Capacitance measuring meter based on one single CPU chip[J];Experimental Technology and Management;2010-12
【Co-citations】
Chinese Journal Full-text Database 10 Hits
1 Wang Jiaqing (Department of Physics);A Method for Analysis of the Nonlinear Distorsion of Negative Feudback Amplifier[J];Journal of Anhui Normal University(Natural Science);1990-02
2 MIAO Xiaofeng (Shaanxi Radio - TV University, Xi'an 710068, Shaanxi, China);The Reform of the Course of Analog Electronic Circuit in IT - times[J];Journal of Ankang Teachers College;2005-05
3 Cao Chengmao Ma Degui (Department of Agricultural Engineering,Anhui Agricultural University,Hefei 230036);Design of A Charging Circuit for Lead Acid Storage Batteries[J];JOURNAL OF ANHUI AGRICULTURAL UNIVERSITY;1998-02
4 ZHAN Wen fa 1,DIN Xian kun 2 (1 The Educational Technical Dept.of Anqing Teachers' College,Anqing 246011,China; 2 The Phy Dept.of Anqing Teachers' College,Anqing 246011,China);Improve input resistance by using bootstrapping[J];Journal of Anqing Teachers College(Natural Science Edition);2001-03
5 XU Ya (Anhui Technical College of Water Resources and Hydroelectric Power, Hefei 230601, China);Judgment method of feedback configuration[J];Journal of Anhui Technical College of Water Resources and Hydroelectric Power;2004-03
6 XU Shu - ling XIN - yu (Department of Physics, Anyang Teachers' College, Anyang 455000, China);The Simple Graphic Method about Low Frequency Amplifier[J];Journal of Anyang University;2004-04
7 XU Shu-ling LIU Wei(Department of Physics, Anyang Teachers’ College, Anyang 455000, China);An Effective Measure Improving the Quality of Differential Signals[J];Journal of Anyang University;2005-06
8 HUANG Qi jun, LI Xue wen, ZHONG Yong chun, DAI Feng, HE Min cai (Dept. of Applied Physics, Wuhan University,Wuhan,430072);Nonlinearity and Temperature Compensation System of Intramodulated Photodetector[J];Semiconductor Optoelectronics;2001-05
9 LI Ying-hui 1, LIU Wang-jie 2, JIANG Cheng 1, ZHANG Yi 1 (1. Chongqing Optoelectronics Research Institute,Chongqing 400060,CHN; 2. The First Navy Personnel School of PLA,Anqing 246005,CHN);Compact Six Channel Integrated Photocoupler[J];Semiconductor Optoelectronics;2002-04
10 LI Ying-hui~(1,2), ZHANG Yi~2, JIANG Cheng~2(1. College of Optoelectronic Information,University of Electronic Science and Technology of China,Chengdu 610054,CHN;2. Chongqing Optoelectronics Research Institute,Chongqing 400060,CHN);High Speed Optocoupler with Eight Channels[J];Semiconductor Optoelectronics;2005-04
China Proceedings of conference Full-text Database 7 Hits
1 Xu Chengbao Liu Yudi Wang Haitao (No.43 Research Institute of China Electronics Technology Corporation, Hefei 230022);The Design of the Model MAS-29 Gyromotor and Sensor Power Generator[A];[C];2005
2 (Institute of Modem Physics,Chinese Academy of Science,Lanzhou of Gansu Prov.730000,China);A RF wdde band amplifier based on separated components[A];[C];2006
3 CHEN Hang TENG Duo QIAN Hui-lin (Marine College of Northwestern Polytechnical University,Xi'an,710072 China);Technology research on electricity matching for broadband transducer[A];[C];2007
4 GAO Zong-hai, WANG Yue-e, LI Da-cheng, MA Ke-yan (Modern Science and Sensor Research Laboratory; Xi'an University of Technology);Micro Current Measurement Method[A];[C];2004
5 Huang Hua Zhu Shiping (Engineering couege of southuest university,Chongqing 400716,China);Deveive of digital frequency based on voice broadcast sunplus single-chip[A];[C];2007
6 XU Kunliang DU Haitao QUAN Haiyan WANG Weilian School of Information, Yunnan University, Kunming 650091 School of Information Engineering and Automation, Yunnan Institute of Technology, Kunming 650093;A New Kind of Circuit Design for Scquiring Heart Sound and ECG Signals[A];[C];2006
7 Gao Yong Xu Zhe Wu Qing Yu Chunxuan Liu Gang Shang Qingrui (School of Electronic Information & Control Engineering, Beijing University of Technology, Beijing, 100022, China);Application of TU35-D420 Jupiter 12 DR GPS Receiver in Vehicle Integrated Positioning[A];[C];2005
【Co-references】
Chinese Journal Full-text Database 10 Hits
1 Li Chengtao,Shen Zhuoshen (School of Material Science and Engineering,USTB,Beijing 100083,China);Packaging Technology of Optoelectronic Window[J];Semiconductor Technology;2008-02
2 ZHAO Jian,WANG Hong-xi,JIA Jian-yuan (School of Electro-Mechanical Engineering,Xidian University,Xian 710071,China);Computation of Electrostatic Forces with Edge Effects for Micro-Structures[J];Micronanoelectronic Technology;2006-02
3 Bian Yumin,Zheng Feng,He Hongtao(The 13th Research Institute,CETC,Shijiazhuang 050051,China);Research on Damping Characteristics of MEMS Piezoresistive Accelerometer[J];Micronanoelectronic Technology;2008-08
4 ZHANG Yu ping 1, JIN Feng 1, ZHANG Yan 1, ZHANG Bao fen 2 (1 Dept. of Automatic Control, Beijing Institute of Technology, Beijing100081, China; 2 Dept. of Automation, Tsinghua University, Beijing100084, China);Phase Concentration Measurement for Two-Phase Flows[J];Journal of Beijing Institute of Technology;2002-03
5 WANG Lei, WANG Baoliang, JI Haifeng, HUANG Zhiyao, LI Haiqing (National Key Laboratory of Industrial Control Technology, Institute of Automation Instrumentation, Department of Control Science and Engineering, Zhejiang University, Hangzhou 310027, P.R.China);New Small Capacitance Measuring Circuit for Capacitance Sensor[J];Journal of Transcluction Technology;2002-04
6 LIU Hua-yi,FAN Shi-yu (College of Communication,Dalian University of Technology,Dalian Liaoning 116023,China);Segmentation Type Capacitance Sensor and Its Application[J];Chinese Journal of Sensors and Actuators;2006-01
7 WANG Cun-chao,SU Yan,WANG Shou-rong (Dept. of Instrument Science and Engin. Southeast Univ. Nanjing 210096, China);Research on Self-Excited Driving of the Silicon Micromachined Vibratory Gyroscope Driver[J];Chinese Journal of Sensors and Actuators;2006-02
8 WANG Zhan-fei,LI Zhi-hong (National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronecs, Peking University,Beijing 100871, China);A Charge Delta-Sigma Modulator for Differential-Capacitance Sensors[J];Chinese Journal of Sensors and Actuators;2006-05
9 CHEN Wei-ping,HAN Tian,WANG Hao,CHEN Hong,LIU Xiao-wei(MEMS Center,Harbin Institute of Technology,Harbin 150001,China);Characteristics of a 2-DOF and Doubly-Decoupled Micromachined Gyroscope[J];Chinese Journal of Sensors and Actuators;2007-11
10 JIANG Qing-hua,YUAN Wei-zheng,CHANG Hong-long,CUI Jin-qiang(Micro&Nano System Laboratory,Northwestern Polytechnical University,Xi'an 710072,China);An Improved Drive Circuit for Vibratory Microgyroscopes[J];Chinese Journal of Sensors and Actuators;2008-03
【Secondary References】
Chinese Journal Full-text Database 5 Hits
1 LIU Rui-jun1,2,LI Xin-e1,2,ZHAO Ding1,2(1.National Key Laboratory for Electronic Measurement Technology,North University of China,Taiyuan 030051,China; 2.Key Laboratory of Instrumentation Science & Dynamic Measurement of Ministry of Education, North University of China,Taiyuan 030051,China);Numerical simulation of the integrated capacitive pressure gauge Based on ANSYS[J];Chinese Journal of Engineering Design;2013-01
2 ZOU Yang;XU Qifeng;Fuzhou University;;Dual-end electrostatic film vibration voltage transformer[J];Electric Power Automation Equipment;2015-04
3 ZHANG Xianguo;CAO Hongsong;ZHAO Handong;BAI Song;School of Mechanical and Electronic Engineering,North University of China;;Bridge Wire Electric Ignition Drive Circuits Design[J];Chinese Journal of Sensors and Actuators;2015-05
4 YI Jian-kun,MA Han-yu,ZHU Jian-sheng,ZHANG Dong-hong(Army Officer Academy of PLA,Hefei 230031,Anhui,China);Research on Testing Technologies of Projectile-Borne Optoelectronic Equipment Under Interior Ballistics Environment[J];Journal of Gun Launch & Control;2013-01
5 Chen Jinjun(Collage of Electrical Engineering,Guizhou University,Guiyang,550003,China);Search on ways for implementing student research training project:Directing with intellectual property education[J];Experimental Technology and Management;2011-12
【Secondary Citations】
Chinese Journal Full-text Database 10 Hits
1 Cao Xinping,Zhang Dacheng,Huang Ru,Zhang Xing and Wang Yangyuan(Institute of Microelectronics,Peking University,Beijing 100871,China);A New Stray-Immune Interface Circuit for Capacitive Sensors[J];Chinese Journal of Semiconductors;2002-07
2 WANG Ying 1, SUN Yu nan 1, QIN Bing kun 1, YIN Ping 2 ( 1. Dept. of Optical Engineering, Beijing Institute of Technology, Beijing100081, China; 2. Dept. of Professional Basic Course, Beijing United University, Beijing 100101, China);A Study on the Driving and Detecting-Electrodes in a Micro Quartz Tuning Fork Gyroscope[J];Journal of Beijing Institute of Technology;2001-04
3 LI Zhi-xin, LUO Xiao-bing, GUO Zeng-yuan (Dept. of Engin. Mechanics, Tsinghua University, Beijing 100084, China);Application of MEMS in inertial measurement[J];Journal of Transducer Technology;2001-07
4 KANG Chun mei, CAO Jin ming, LIU Guang hui (The 49th Institute of the Electronics, Ministry of Information Industry, Harbin 150001,China);Foreign status of MEMS technology and application in military[J];Journal of Transducer Technology;2002-06
5 WAN Yan-hui, PEI Ting-guo, DAI Shi-rong (Dept of Automatic Control,Northwestern Polytechnical University,Xi'an 710100,China);Application of digital filter in micro mechanical gyro system[J];Journal of Transducer Technology;2003-09
6 LI Wan-yu, DONG Jie-chun (Sch of Automatic Engin,Qingdao University, Qingdao 266071,China);Simulation and optimization of micromachined gyroscope[J];Journal of Transducer Technology;2004-03
7 Mao Pansong;Wang Xiulun(Southeast University);Electrostatic Drive Technology of Silicon Micromechanical Vibrating Gyroscope[J];JOURNAL OF TRANSDUCER TECHNOLOGY;1996-01
8 Li Wanyu (No.618 Research Institute, Aeronautics Industry Co.,Xi'an 710065) Ruan Aiwu (Automatic Control Department,Northwestern Polytechnical University) Luo Jinsheng (Electronics & Information School,Xi'an Jiaotong University);Investigation of Extracting Input Angular Rate Signal for Micromachined Gyroscopes[J];JOURNAL OF TRANSDUCER TECHNOLOGY;1999-02
9 Li WanyuRuan Aiwu*Luo Jinsheng#Feng Peide (No.618 Research Institute, Aeronautics Industry Co.,Xi'an T5HZ710065 ) (Automatic Control Department,Northwestern Polytechnical University)*(Electronics & Information School,Xi'an Jiaotong University;Detection Technology for Micromachined Gyroscopes[J];JOURNAL OF TRANSDUCER TECHNOLOGY;1999-03
10 Che Lufeng Xiong Bin Huang Xiaozhen Wang Yuelin (State Key Lab. of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China);EQUIVALENT ELECTRICAL SIMULATION OF MICROMACHINED GYROSCOPE'S OSCILLATING PROPERTIES[J];Journal of Electronics and Information Technology;2003-02
©2006 Tsinghua Tongfang Knowledge Network Technology Co., Ltd.(Beijing)(TTKN) All rights reserved