Characteristics of a 2-DOF and Doubly-Decoupled Micromachined Gyroscope
CHEN Wei-ping,HAN Tian,WANG Hao,CHEN Hong,LIU Xiao-wei(MEMS Center,Harbin Institute of Technology,Harbin 150001,China)
To reduce the mechanical couple and improve the operating stability of MEMS gyroscopes,a novel 2-DOF and doubly-decoupled mems gyroscope was presented.The dynamics equation of the gyroscope was built and solved. By analyzing the solution results,the system characteristics of sensitivity and bandwidth were discussed theoretically.The system characteristics were also researched by numerical method of MATLAB,the simulation results show that when the gyroscope operates in the flat region,the change of quality-factor from 50 to 1000 makes the alteration of amplitude and plase a little.Both the theoretical and simulation results validate that when the gyroscope operates in suitable frequency it can obtain high stability.
【CateGory Index】： TP212