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《Chinese Journal of Sensors and Actuators》 2007-11
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Measure,Analysis and Improvement of the On-Chip Interface Circuit for a MEMS Capacitive Pressure Sensor

HUANG Xiao-dong,WANG Bin,QIN Ming(Key Laboratory of MEMS of Ministry of Education,Nanjing 210096,China)  
This paper reports the analysis of the measurement of the On-Chip interface circuit for a capacitive pressure sensor.Since the Schmitt trigger has a large parasitic capacitor and the threshold voltage is difficult to adjust,a new improved Schmitt circuit is present.The simulation indicates the new Schmitt trigger greatly reduces parasitic capacitor and the threshold voltage is easier to adjust.A negative equivalent circuit is also introduced to solve the low sensitivity of the interface circuit,which is due to large initial capacitor.The PSPICE simulation proves the validity of the method.
【Fund】: 国家自然科学基金重点项目资助课题(90607002)
【CateGory Index】: TP212
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