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《Chinese Journal of Sensors and Actuators》 2008-02
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Study of a Novel Micromachined Capacitive Accelerometer

ZHENG Xu-dong,CAO Xue-cheng,ZHENG Yang-ming,LUO Si-jian,WANG Yue-lin,JIN Zhong-he (Department of Information Science & Electronic Engineering, Zhejiang University, Hangzhou 310027, China)  
A novel micromachined capacitive accelerometer, based on slide-film damping principle, was reported. The acceleration is measured by modifying the effective overlap area of a differential capacitor pair and the linearity between output voltage and acceleration is ensured. The accelerometer was fabricated on the base of bulk micromachining process and the anodic bonding between the silicon and glass. The rooting effect of the structure in deep reactive ion etching (DRIE) process was investigated.The measurement sensitivity of the accelerometer is very ideal, and the measured resonant frequency of the device is matched well with the theoretical predition.
【Fund】: 国家重点基础研究发展计划资助(973计划)(2006CB300405)
【CateGory Index】: TH824.4
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